A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MULTILAYER SINTERED CERAMIC BODY
Disclosed herein is a multilayer sintered ceramic body comprising: a first layer selected from the group consisting of YAG, magnesium aluminate spinel and at least one crystalline phase comprising yttria and zirconia, wherein the zirconia is present in an amount of not less than 10 mol% ZrO2 and not greater than 25 mol% ZrO2, a second layer comprising Al2O3 and ZrO2 wherein ZrO2 is present in an amount of not less than 10 % ZrO2 by volume and not greater than 25% ZrO2 by volume, and a third layer comprising combinations of the first layer and the second layer and the second layer is disposed between the first layer and the third layer, and the absolute value of the coefficient of thermal expansion (CTE) of the first, second and third layers differ in an amount of from 0 to less than 0.6 x 10-6/°C. The multilayer sintered ceramic body and chamber components fabricated therefrom may have enhanced adhesion between layers, high mechanical strength and excellent machinability through the CTE matching layers disclosed herein. Use in semiconductor plasma processing chambers and methods of making are disclosed.
MULTILAYER SINTERED CERAMIC BODY
Disclosed herein is a multilayer sintered ceramic body comprising: a first layer selected from the group consisting of YAG, magnesium aluminate spinel and at least one crystalline phase comprising yttria and zirconia, wherein the zirconia is present in an amount of not less than 10 mol% ZrO2 and not greater than 25 mol% ZrO2, a second layer comprising Al2O3 and ZrO2 wherein ZrO2 is present in an amount of not less than 10 % ZrO2 by volume and not greater than 25% ZrO2 by volume, and a third layer comprising combinations of the first layer and the second layer and the second layer is disposed between the first layer and the third layer, and the absolute value of the coefficient of thermal expansion (CTE) of the first, second and third layers differ in an amount of from 0 to less than 0.6 x 10-6/°C. The multilayer sintered ceramic body and chamber components fabricated therefrom may have enhanced adhesion between layers, high mechanical strength and excellent machinability through the CTE matching layers disclosed herein. Use in semiconductor plasma processing chambers and methods of making are disclosed.
MULTILAYER SINTERED CERAMIC BODY
MEHRSCHICHTIGER SINTERKERAMIKKÖRPER
CORPS FRITTÉ EN CÉRAMIQUE MULTICOUCHE
WALKER LUKE (author) / DONELON MATTHEW JOSEPH (author)
2022-07-27
Patent
Electronic Resource
English