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PRESSED SILICON CARBIDE (SIC) MULTILAYER FLUIDIC MODULES
A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body and a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage lying within two or more layers with the silicon carbide body, the tortuous passage having an interior surface, the interior surface having a surface roughness of less than 10 μm Ra. A method of forming the fluidic module is also disclosed.
PRESSED SILICON CARBIDE (SIC) MULTILAYER FLUIDIC MODULES
A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body and a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage lying within two or more layers with the silicon carbide body, the tortuous passage having an interior surface, the interior surface having a surface roughness of less than 10 μm Ra. A method of forming the fluidic module is also disclosed.
PRESSED SILICON CARBIDE (SIC) MULTILAYER FLUIDIC MODULES
FLUIDISCHE MEHRSCHICHTMODULE AUS GEPRESSTEM SILICIUMCARBID (SIC)
MODULES FLUIDIQUES MULTICOUCHES EN CARBURE DE SILICIUM (SIC) PRESSÉ
CUNO ALEXANDER LEE (author) / LIM HOWEN (author) / SUTHERLAND JAMES SCOTT (author) / WHEELER OSCAR WALTER (author)
2023-06-21
Patent
Electronic Resource
English
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