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CERAMIC MEMBER
PROBLEM TO BE SOLVED: To provide a ceramic member by which a burr or a minute crack can be prevented from being generated around the supporting point when the ceramic member is produced.SOLUTION: The surface 201 of a base material 20 has a first ceramic coating film 22 and a second ceramic coating film 23. The second ceramic coating film 23 has an inclined part 222, the thickness of which becomes thinner gradually, and an opening 221, which is surrounded by the inclined part 222 and through which the surface of the first ceramic coating film 22 is exposed. In other words, when the second ceramic coating film 23 is formed, the first ceramic coating film 22-formed base material 20 is supported by the opening 221 through which the surface of the first ceramic coating film 22 is exposed. Consequently, since a supporting tool 30 can be prevented from being stuck firmly to the first ceramic coating film 22 by the second ceramic coating film 23, when the base material 20 is detached from the supporting tool 30 after CVD, a harmful burr or a minute crack can be prevented from being generated around the supporting point.
【課題】セラミック部材製造時における支持点の周囲に、バリあるいは微少なクラックが発生するのを防止できるセラミック部材を提供する。【解決手段】基材20の表面201は第1のセラミック被膜22および第2のセラミック被膜23を有し、第2のセラミック被膜23は、漸次膜厚が薄くなる傾斜部222と、傾斜部222に囲まれるとともに第1のセラミック被膜22の表面が露出する開口部221とを有する。すなわち、第2のセラミック被膜23を形成する際に、第1のセラミック被膜22の表面が露出する開口部221において、第1のセラミック被膜22が形成された基材20を支持する。これにより、支持具30が第2のセラミック被膜23によって第1のセラミック被膜22に固着するのを防止できるので、CVD後に、基材20を支持具30から取り外す際に、支持点の周囲に有害なバリの発生、微少なクラックの発生を防止することができる。【選択図】図1
CERAMIC MEMBER
PROBLEM TO BE SOLVED: To provide a ceramic member by which a burr or a minute crack can be prevented from being generated around the supporting point when the ceramic member is produced.SOLUTION: The surface 201 of a base material 20 has a first ceramic coating film 22 and a second ceramic coating film 23. The second ceramic coating film 23 has an inclined part 222, the thickness of which becomes thinner gradually, and an opening 221, which is surrounded by the inclined part 222 and through which the surface of the first ceramic coating film 22 is exposed. In other words, when the second ceramic coating film 23 is formed, the first ceramic coating film 22-formed base material 20 is supported by the opening 221 through which the surface of the first ceramic coating film 22 is exposed. Consequently, since a supporting tool 30 can be prevented from being stuck firmly to the first ceramic coating film 22 by the second ceramic coating film 23, when the base material 20 is detached from the supporting tool 30 after CVD, a harmful burr or a minute crack can be prevented from being generated around the supporting point.
【課題】セラミック部材製造時における支持点の周囲に、バリあるいは微少なクラックが発生するのを防止できるセラミック部材を提供する。【解決手段】基材20の表面201は第1のセラミック被膜22および第2のセラミック被膜23を有し、第2のセラミック被膜23は、漸次膜厚が薄くなる傾斜部222と、傾斜部222に囲まれるとともに第1のセラミック被膜22の表面が露出する開口部221とを有する。すなわち、第2のセラミック被膜23を形成する際に、第1のセラミック被膜22の表面が露出する開口部221において、第1のセラミック被膜22が形成された基材20を支持する。これにより、支持具30が第2のセラミック被膜23によって第1のセラミック被膜22に固着するのを防止できるので、CVD後に、基材20を支持具30から取り外す際に、支持点の周囲に有害なバリの発生、微少なクラックの発生を防止することができる。【選択図】図1
CERAMIC MEMBER
セラミック部材
KOGA YASUTAKA (author) / HIROSE TAKASHI (author) / HIGUCHI NAOKI (author)
2016-01-21
Patent
Electronic Resource
Japanese