A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
DIELECTRIC FILM AND DIELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a dielectric film having good temperature characteristics of capacitance while maintaining a high relative dielectric constant, in relation to a dielectric element, such as a thin film capacitor, provided with a dielectric film.SOLUTION: The dielectric film contains, as a main component, a dielectric composition represented by a general formula: (BaCa)(TiZr)O, where, in the general formula, 0.001≤x≤0.400, 0.001≤y≤0.400, and 0.900≤z<0.995. Further, in an X-ray diffraction chart of the dielectric composition, the diffraction peak position 2θof the (001) face of the tetragonal system represented by the general formula and the diffraction peak position 2θof the (100) face of the cubic system represented by the general formula have a relationship: 0.00°≤2θ-2θ<0.20°.SELECTED DRAWING: Figure 1
【課題】誘電体膜を備える薄膜コンデンサ等の誘電体素子に関し、比誘電率を高く維持しつつ、良好な静電容量の温度特性を示す誘電体膜を提供すること。【解決手段】主成分が、一般式（Ｂａ１−ｘＣａｘ）ｚ（Ｔｉ１−ｙＺｒｙ）Ｏ３で表され、前記一般式で、０．００１≦ｘ≦０．４００、０．００１≦ｙ≦０．４００、かつ、０．９００≦ｚ＜０．９９５で表わされる誘電体組成物であり、かつ、かつ、前記誘電体組成物のＸ線回折チャートにおいて、前記一般式の示す正方晶系の（００１）面の回折ピーク位置２θｔと、前記一般式の示す立方晶系の（１００）面の回折ピーク位置２θｃの関係が０．００°≦２θｃ−２θｔ＜０．２０°である誘電体膜。【選択図】図１
DIELECTRIC FILM AND DIELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a dielectric film having good temperature characteristics of capacitance while maintaining a high relative dielectric constant, in relation to a dielectric element, such as a thin film capacitor, provided with a dielectric film.SOLUTION: The dielectric film contains, as a main component, a dielectric composition represented by a general formula: (BaCa)(TiZr)O, where, in the general formula, 0.001≤x≤0.400, 0.001≤y≤0.400, and 0.900≤z<0.995. Further, in an X-ray diffraction chart of the dielectric composition, the diffraction peak position 2θof the (001) face of the tetragonal system represented by the general formula and the diffraction peak position 2θof the (100) face of the cubic system represented by the general formula have a relationship: 0.00°≤2θ-2θ<0.20°.SELECTED DRAWING: Figure 1
【課題】誘電体膜を備える薄膜コンデンサ等の誘電体素子に関し、比誘電率を高く維持しつつ、良好な静電容量の温度特性を示す誘電体膜を提供すること。【解決手段】主成分が、一般式（Ｂａ１−ｘＣａｘ）ｚ（Ｔｉ１−ｙＺｒｙ）Ｏ３で表され、前記一般式で、０．００１≦ｘ≦０．４００、０．００１≦ｙ≦０．４００、かつ、０．９００≦ｚ＜０．９９５で表わされる誘電体組成物であり、かつ、かつ、前記誘電体組成物のＸ線回折チャートにおいて、前記一般式の示す正方晶系の（００１）面の回折ピーク位置２θｔと、前記一般式の示す立方晶系の（１００）面の回折ピーク位置２θｃの関係が０．００°≦２θｃ−２θｔ＜０．２０°である誘電体膜。【選択図】図１
DIELECTRIC FILM AND DIELECTRIC ELEMENT
誘電体膜および誘電体素子
TAKEDA SAORI (author) / FURUKAWA MASAHITO (author) / KOSUDA MASANORI (author) / SEZAI YUJI (author)
2016-04-25
Patent
Electronic Resource
Japanese