A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CYLINDRICAL CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCTION THEREOF
PROBLEM TO BE SOLVED: To provide a method for production of a cylindrical ceramic sintered compact few in deformation at burning and capable of restraining cracks or chips at joining to a backing tube or at sputtering.SOLUTION: A method for production of a cylindrical ceramic sintered compact includes: setting a sole plate 3 having a vent hole 4 in a burning furnace; disposing plural support members 5 on the sole plate 3 radially around the vent hole 4 so that the longitudinal direction of the support member coincides with the radial direction of a circle of the vent hole 4 as a center; placing a cylindrical ceramic molded body 6 molded by a CIP (cold isostatic press) method on the support member 5 in an erected state so that the center of the vent hole 4 coincides with a cylinder axis; and then burning.SELECTED DRAWING: Figure 1
【課題】焼成時における変形が少なく、かつ、バッキングチューブとの接合時やスパッタリング時における割れや欠けを抑制可能な円筒形セラミックス焼結体の製造方法の提供。【解決手段】焼成炉内に、通気孔４を有する敷板３を設置し、敷板３上に、複数の支持部材５を、通気孔４を中心として、その長手方向が、通気孔４を中心とする円の径方向と一致するように、かつ、放射状に配置する。その後、支持部材５上に、通気孔４の中心と円筒軸が一致するように、ＣＩＰ法により成形した円筒形セラミックス成形体６を直立させた状態で載置し、焼成する。【選択図】図１
CYLINDRICAL CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCTION THEREOF
PROBLEM TO BE SOLVED: To provide a method for production of a cylindrical ceramic sintered compact few in deformation at burning and capable of restraining cracks or chips at joining to a backing tube or at sputtering.SOLUTION: A method for production of a cylindrical ceramic sintered compact includes: setting a sole plate 3 having a vent hole 4 in a burning furnace; disposing plural support members 5 on the sole plate 3 radially around the vent hole 4 so that the longitudinal direction of the support member coincides with the radial direction of a circle of the vent hole 4 as a center; placing a cylindrical ceramic molded body 6 molded by a CIP (cold isostatic press) method on the support member 5 in an erected state so that the center of the vent hole 4 coincides with a cylinder axis; and then burning.SELECTED DRAWING: Figure 1
【課題】焼成時における変形が少なく、かつ、バッキングチューブとの接合時やスパッタリング時における割れや欠けを抑制可能な円筒形セラミックス焼結体の製造方法の提供。【解決手段】焼成炉内に、通気孔４を有する敷板３を設置し、敷板３上に、複数の支持部材５を、通気孔４を中心として、その長手方向が、通気孔４を中心とする円の径方向と一致するように、かつ、放射状に配置する。その後、支持部材５上に、通気孔４の中心と円筒軸が一致するように、ＣＩＰ法により成形した円筒形セラミックス成形体６を直立させた状態で載置し、焼成する。【選択図】図１
CYLINDRICAL CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCTION THEREOF
円筒形セラミックス焼結体およびその製造方法
IGARASHI SHIGERU (author) / SOGABE KENTARO (author) / OZAWA MAKOTO (author) / ANDO ISAO (author)
2016-05-23
Patent
Electronic Resource
Japanese
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