A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED COMPACT, AND PRODUCTION METHOD THEREFOR
PROBLEM TO BE SOLVED: To provide an oxide sintered compact which consists of niobium oxide, has high density, can allow DC to be discharged therefrom and is obtained inexpensively, and to provide a production method of the oxide sintered compact, in which the oxide sintered compact can be obtained easily by using an inexpensive facility without adopting an HP method or an HIP method.SOLUTION: The oxide sintered compact is characterized in that the density thereof is 95% or higher, the bulk resistance thereof is 1,000 Ω-cm or lower, the area of whose target surface is 500 cmor larger and the niobium (IV) oxide belonging to a NbOphase does not exist when measured by an X-ray diffraction method.SELECTED DRAWING: None
【課題】 本発明の目的は、酸化ニオブからなる高密度でＤＣ放電可能な酸化物焼結体を安価に提供することであり、ＨＰ法やＨＩＰ法によらず安価な設備で容易に得ることができる製造方法を提供することである。【解決手段】 焼結体密度が９５％以上であり、バルク抵抗が１０００Ω・ｃｍ以下であり、ターゲット面の面積が５００ｃｍ２以上であり、Ｘ線回折でＮｂＯ２相に帰属される酸化ニオブ（ＩＶ）が存在しないことを特徴とする酸化ニオブ焼結体。【選択図】 なし
OXIDE SINTERED COMPACT, AND PRODUCTION METHOD THEREFOR
PROBLEM TO BE SOLVED: To provide an oxide sintered compact which consists of niobium oxide, has high density, can allow DC to be discharged therefrom and is obtained inexpensively, and to provide a production method of the oxide sintered compact, in which the oxide sintered compact can be obtained easily by using an inexpensive facility without adopting an HP method or an HIP method.SOLUTION: The oxide sintered compact is characterized in that the density thereof is 95% or higher, the bulk resistance thereof is 1,000 Ω-cm or lower, the area of whose target surface is 500 cmor larger and the niobium (IV) oxide belonging to a NbOphase does not exist when measured by an X-ray diffraction method.SELECTED DRAWING: None
【課題】 本発明の目的は、酸化ニオブからなる高密度でＤＣ放電可能な酸化物焼結体を安価に提供することであり、ＨＰ法やＨＩＰ法によらず安価な設備で容易に得ることができる製造方法を提供することである。【解決手段】 焼結体密度が９５％以上であり、バルク抵抗が１０００Ω・ｃｍ以下であり、ターゲット面の面積が５００ｃｍ２以上であり、Ｘ線回折でＮｂＯ２相に帰属される酸化ニオブ（ＩＶ）が存在しないことを特徴とする酸化ニオブ焼結体。【選択図】 なし
OXIDE SINTERED COMPACT, AND PRODUCTION METHOD THEREFOR
酸化物焼結体及びその製造方法
HARA HIROYUKI (author) / ITO KENICHI (author) / HARA SHINICHI (author) / ONOMI KENJI (author)
2016-11-04
Patent
Electronic Resource
Japanese
| European Patent Office | 2016
GARNET TYPE OXIDE SINTERED COMPACT AND PRODUCTION METHOD THEREFOR
| European Patent Office | 2017
| European Patent Office | 2017
| European Patent Office | 2016