A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
VACUUM SUCTION MEMBER
To provide a vacuum suction member capable of restraining detachment of particles composing a porous member.SOLUTION: A vacuum suction member 3 includes a dense member 1 in which a recess 12 having a top face 4 and a reverse face 5, and recessed in the direction from the top face 4 toward the reverse face 5, and an interconnection path 10 constituted of a through hole provided from the reverse face 5 to the bottom face 13 of the recess 12 are formed, and a porous member 2 housed in the recess 12 of the dense member 1 and at least the lateral face of which is bonded to the dense member 1 over the whole circumference. A coat 22 is covering the top face 4 of the porous member 2, while maintaining gas permeability of a secondary vacuum passage R2 constituted of the open pore 24 of the porous member 2. The coat 22 has a porosity lower than that of the porous member 2.SELECTED DRAWING: Figure 2
【課題】孔質部材を構成する粒子の脱離の抑制を図りうる真空吸着部材を提供する。【解決手段】真空吸着部材３は、上面４および裏面５を有し、上面４から裏面５に向かう方向に窪んでいる凹部１２と、裏面５から凹部１２の底面１３にかけて設けられた貫通孔で構成される連通経路１０と、が形成されている緻密質部材１と、緻密質部材１の凹部１２に収容された状態で少なくとも側面が全周にわたり緻密質部材１に対して接合されている多孔質部材２と、を備えている。多孔質部材２の開気孔２４により構成される２次真空経路Ｒ２の通気性を維持しながら、多孔質部材２の上面４を覆う被膜２２を備えている。被膜２２は、多孔質部材２よりも低い気孔率を有する。【選択図】図２
VACUUM SUCTION MEMBER
To provide a vacuum suction member capable of restraining detachment of particles composing a porous member.SOLUTION: A vacuum suction member 3 includes a dense member 1 in which a recess 12 having a top face 4 and a reverse face 5, and recessed in the direction from the top face 4 toward the reverse face 5, and an interconnection path 10 constituted of a through hole provided from the reverse face 5 to the bottom face 13 of the recess 12 are formed, and a porous member 2 housed in the recess 12 of the dense member 1 and at least the lateral face of which is bonded to the dense member 1 over the whole circumference. A coat 22 is covering the top face 4 of the porous member 2, while maintaining gas permeability of a secondary vacuum passage R2 constituted of the open pore 24 of the porous member 2. The coat 22 has a porosity lower than that of the porous member 2.SELECTED DRAWING: Figure 2
【課題】孔質部材を構成する粒子の脱離の抑制を図りうる真空吸着部材を提供する。【解決手段】真空吸着部材３は、上面４および裏面５を有し、上面４から裏面５に向かう方向に窪んでいる凹部１２と、裏面５から凹部１２の底面１３にかけて設けられた貫通孔で構成される連通経路１０と、が形成されている緻密質部材１と、緻密質部材１の凹部１２に収容された状態で少なくとも側面が全周にわたり緻密質部材１に対して接合されている多孔質部材２と、を備えている。多孔質部材２の開気孔２４により構成される２次真空経路Ｒ２の通気性を維持しながら、多孔質部材２の上面４を覆う被膜２２を備えている。被膜２２は、多孔質部材２よりも低い気孔率を有する。【選択図】図２
VACUUM SUCTION MEMBER
真空吸着部材
AKAMA DAIKI (author) / ABE TOSHIHIKO (author)
2019-01-24
Patent
Electronic Resource
Japanese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B25J
Manipulatoren
,
MANIPULATORS
/
C04B
Kalk
,
LIME
/
G03F
Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen
,
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
METHOD FOR MANUFACTURING SUCTION MEMBER, AND SUCTION MEMBER
| European Patent Office | 2022
| European Patent Office | 2021