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ANODE JOINT DEVICE, AND METHOD OF ANODE JOINT
To provide an anode joint device capable of aborting a joint and retracing the joint when foreign matters interpose between substrates to be joined, and a method of anode joint.SOLUTION: An anode join device includes: 2 superimposed substrates 11, 12; a contact probe 15 for pressing a center part of superimposed faces of the substrates 11, 12; a heater 16 for heating the substrates 11, 12; a direct current voltage source 22 for supplying a voltage between a dummy electrode plate 13 and an electrode 14; and a control part 21 for sequentially narrowing a gap between the substrates 11, 12 toward an outer peripheral part from the center part of the superimposed faces to join the superimposed faces by gradually increasing a supplied voltage to gradually increase a static attracting force generated between the substrates 11, 12, where the control part 21 stops voltage supply when a current flowing between the substrates 11, 12 by a supplied voltage does not exceed a predetermined threshold current value even if the supplied voltage exceeds a predetermined threshold voltage value.SELECTED DRAWING: Figure 1
【課題】接合する基板間に異物が介在されている場合には、接合を中止して、その接合をやり直すことができる陽極接合装置及びその方法を提供する。【解決手段】重ね合わされる２つの基板１１，１２と、基板１１，１２間における重ね合わせ面の中心部を押圧するコンタクトプローブ１５と、基板１１，１２を加熱するヒータ１６と、ダミー電極基板１３と電極１４との間に電圧を印加する直流電圧電源２２と、印加する電圧を徐々に大きくして、基板１１，１２間に発生する静電引力を徐々に大きくさせることによって、基板１１，１２間における隙間を、重ね合わせ面の中心部からその外周縁部に向けて順次狭めて、重ね合わせ面を接合する制御部２１とを備え、制御部２１は、印加した電圧が所定の電圧閾値を越えても、その印加した電圧に伴って基板１１，１２間に流れる電流が所定の電流閾値を超えない場合には、電圧印加を停止させる。【選択図】図１
ANODE JOINT DEVICE, AND METHOD OF ANODE JOINT
To provide an anode joint device capable of aborting a joint and retracing the joint when foreign matters interpose between substrates to be joined, and a method of anode joint.SOLUTION: An anode join device includes: 2 superimposed substrates 11, 12; a contact probe 15 for pressing a center part of superimposed faces of the substrates 11, 12; a heater 16 for heating the substrates 11, 12; a direct current voltage source 22 for supplying a voltage between a dummy electrode plate 13 and an electrode 14; and a control part 21 for sequentially narrowing a gap between the substrates 11, 12 toward an outer peripheral part from the center part of the superimposed faces to join the superimposed faces by gradually increasing a supplied voltage to gradually increase a static attracting force generated between the substrates 11, 12, where the control part 21 stops voltage supply when a current flowing between the substrates 11, 12 by a supplied voltage does not exceed a predetermined threshold current value even if the supplied voltage exceeds a predetermined threshold voltage value.SELECTED DRAWING: Figure 1
【課題】接合する基板間に異物が介在されている場合には、接合を中止して、その接合をやり直すことができる陽極接合装置及びその方法を提供する。【解決手段】重ね合わされる２つの基板１１，１２と、基板１１，１２間における重ね合わせ面の中心部を押圧するコンタクトプローブ１５と、基板１１，１２を加熱するヒータ１６と、ダミー電極基板１３と電極１４との間に電圧を印加する直流電圧電源２２と、印加する電圧を徐々に大きくして、基板１１，１２間に発生する静電引力を徐々に大きくさせることによって、基板１１，１２間における隙間を、重ね合わせ面の中心部からその外周縁部に向けて順次狭めて、重ね合わせ面を接合する制御部２１とを備え、制御部２１は、印加した電圧が所定の電圧閾値を越えても、その印加した電圧に伴って基板１１，１２間に流れる電流が所定の電流閾値を超えない場合には、電圧印加を停止させる。【選択図】図１
ANODE JOINT DEVICE, AND METHOD OF ANODE JOINT
陽極接合装置及びその方法
GAMO YOSHIHIRO (author) / YUKI KOJI (author)
2019-02-28
Patent
Electronic Resource
Japanese
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