A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING THE SAME
SOLUTION: A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material.EFFECT: Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.SELECTED DRAWING: Figure 1
【解決手段】（ｉ）内側バルク黒鉛材料及び（ｉｉ）外側炭化ケイ素マトリックス材料を含む炭化ケイ素−黒鉛複合材であって、内側バルク黒鉛材料及び外側炭化ケイ素マトリックス材料は、それらの間の界面領域で互いに相互浸透し、黒鉛が、外側炭化ケイ素マトリックス材料内の介在物中に存在する。【効果】このような炭化ケイ素−黒鉛複合材は、太陽電池又は他の光学製品、光電子製品、光子製品、半導体製品及びマイクロ電子製品の製造における注入ハードマスクなどの用途において、並びにビームライン組立品、ビームステアリングレンズ、イオン化チャンバーライナー、ビームストップ及びイオン源チャンバーなどのイオン注入システムの材料、部品及び組立品において有用に用いられる。【選択図】図１
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING THE SAME
SOLUTION: A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material.EFFECT: Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.SELECTED DRAWING: Figure 1
【解決手段】（ｉ）内側バルク黒鉛材料及び（ｉｉ）外側炭化ケイ素マトリックス材料を含む炭化ケイ素−黒鉛複合材であって、内側バルク黒鉛材料及び外側炭化ケイ素マトリックス材料は、それらの間の界面領域で互いに相互浸透し、黒鉛が、外側炭化ケイ素マトリックス材料内の介在物中に存在する。【効果】このような炭化ケイ素−黒鉛複合材は、太陽電池又は他の光学製品、光電子製品、光子製品、半導体製品及びマイクロ電子製品の製造における注入ハードマスクなどの用途において、並びにビームライン組立品、ビームステアリングレンズ、イオン化チャンバーライナー、ビームストップ及びイオン源チャンバーなどのイオン注入システムの材料、部品及び組立品において有用に用いられる。【選択図】図１
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING THE SAME
炭化ケイ素／黒鉛複合材並びにそれを含む物品及び組立品
TROY SCOGGINS (author) / REX GERALD SHEPPARD (author) / ABUAGELA H RASHED (author) / JONATHAN LOYD BURR (author)
2020-08-20
Patent
Electronic Resource
Japanese
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME
| European Patent Office | 2019
Silicon carbide/graphite composite and articles and assemblies comprising same
| European Patent Office | 2023
Silicon carbide/graphite composite and articles and assemblies comprising same
| European Patent Office | 2021
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME
| European Patent Office | 2018
SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME
| European Patent Office | 2021