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A platform for research: civil engineering, architecture and urbanism
LAMINATED STRUCTURE
To provide a laminated structure excellent in electric characteristics and optical characteristics while suppressing generation of defects such as speckles by suppressing aggregation of an Ag film caused by chlorine.SOLUTION: A laminated structure 10 includes a substrate 11 and a laminated film 20 formed on one surface of the substrate 11. The laminated film 20 has an Ag film 21 formed from Ag or an Ag alloy, and dielectric films 23 respectively laminated adjacent to one surface and the other surface of the Ag film 21. At least one of the dielectric films 23 laminated adjacent to the Ag film 21 is a GaTiZn oxide film containing Ga, Ti, and Zn, and the GaTiZn oxide film is formed in a section of the laminated film other than the outermost layer.SELECTED DRAWING: Figure 1
【課題】塩素を原因とするＡｇ膜の凝集を抑制することで、斑点等の欠陥の発生を抑制し、電気特性及び光学特性に優れた積層構造体を提供する。【解決手段】基材１１と、この基材１１の一面に形成された積層膜２０と、を備えた積層構造体１０であって、積層膜２０は、Ａｇ又はＡｇ合金からなるＡｇ膜２１と、このＡｇ膜２１の一方の面及び他方の面に隣接して積層された誘電体膜２３と、を有し、Ａｇ膜２１に隣接して積層された誘電体膜２３の少なくとも一方は、Ｇａ，Ｔｉ，Ｚｎを含むＧａＴｉＺｎ酸化物膜であり、前記ＧａＴｉＺｎ酸化物膜は、前記積層膜の最表層以外の部分に形成されていることを特徴とする。【選択図】図１
LAMINATED STRUCTURE
To provide a laminated structure excellent in electric characteristics and optical characteristics while suppressing generation of defects such as speckles by suppressing aggregation of an Ag film caused by chlorine.SOLUTION: A laminated structure 10 includes a substrate 11 and a laminated film 20 formed on one surface of the substrate 11. The laminated film 20 has an Ag film 21 formed from Ag or an Ag alloy, and dielectric films 23 respectively laminated adjacent to one surface and the other surface of the Ag film 21. At least one of the dielectric films 23 laminated adjacent to the Ag film 21 is a GaTiZn oxide film containing Ga, Ti, and Zn, and the GaTiZn oxide film is formed in a section of the laminated film other than the outermost layer.SELECTED DRAWING: Figure 1
【課題】塩素を原因とするＡｇ膜の凝集を抑制することで、斑点等の欠陥の発生を抑制し、電気特性及び光学特性に優れた積層構造体を提供する。【解決手段】基材１１と、この基材１１の一面に形成された積層膜２０と、を備えた積層構造体１０であって、積層膜２０は、Ａｇ又はＡｇ合金からなるＡｇ膜２１と、このＡｇ膜２１の一方の面及び他方の面に隣接して積層された誘電体膜２３と、を有し、Ａｇ膜２１に隣接して積層された誘電体膜２３の少なくとも一方は、Ｇａ，Ｔｉ，Ｚｎを含むＧａＴｉＺｎ酸化物膜であり、前記ＧａＴｉＺｎ酸化物膜は、前記積層膜の最表層以外の部分に形成されていることを特徴とする。【選択図】図１
LAMINATED STRUCTURE
積層構造体
TOSHIMORI YUTO (author) / NONAKA SOHEI (author)
2021-05-27
Patent
Electronic Resource
Japanese
IPC:
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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