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A platform for research: civil engineering, architecture and urbanism
MANUFACTURING METHOD OF MOLD VACUUM VALVE
To provide a manufacturing method of a mold vacuum valve in which the adhesion between an insulating layer of the mold vacuum valve and the ceramics is good.SOLUTION: A manufacturing method of a mold vacuum valve according to an embodiment includes the steps of applying a silane compound coating solution to the surface of a ceramic container to form a silane compound layer, heating the silane compound layer to 100°C or higher, and applying an insulating material to the surface of a vacuum valve via the heated silane compound layer to form an insulating layer.SELECTED DRAWING: Figure 1
【課題】モールド真空バルブの絶縁層とセラミックスの間の接着を良好にしたモールド真空バルブの製造方法を提供する。【解決手段】実施形態によれば、モールド真空バルブの製造方法は、セラミックス容器の表面にシラン化合物塗布液を塗布し、シラン化合物層を形成する工程と、シラン化合物層を１００℃以上に加熱する工程と、加熱されたシラン化合物層を介して、真空バルブの表面に絶縁材料を適用し、絶縁層を形成する工程とを含む。【選択図】図１
MANUFACTURING METHOD OF MOLD VACUUM VALVE
To provide a manufacturing method of a mold vacuum valve in which the adhesion between an insulating layer of the mold vacuum valve and the ceramics is good.SOLUTION: A manufacturing method of a mold vacuum valve according to an embodiment includes the steps of applying a silane compound coating solution to the surface of a ceramic container to form a silane compound layer, heating the silane compound layer to 100°C or higher, and applying an insulating material to the surface of a vacuum valve via the heated silane compound layer to form an insulating layer.SELECTED DRAWING: Figure 1
【課題】モールド真空バルブの絶縁層とセラミックスの間の接着を良好にしたモールド真空バルブの製造方法を提供する。【解決手段】実施形態によれば、モールド真空バルブの製造方法は、セラミックス容器の表面にシラン化合物塗布液を塗布し、シラン化合物層を形成する工程と、シラン化合物層を１００℃以上に加熱する工程と、加熱されたシラン化合物層を介して、真空バルブの表面に絶縁材料を適用し、絶縁層を形成する工程とを含む。【選択図】図１
MANUFACTURING METHOD OF MOLD VACUUM VALVE
モールド真空バルブの製造方法
KOMIYA GEN (author) / MATSUOKA MIYOSHI (author) / TAGAYA OSAMU (author)
2021-11-01
Patent
Electronic Resource
Japanese
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