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CERAMIC STRUCTURE, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
To provide a ceramic structure improved in adhesion between a ceramic and a thermoelectric element.SOLUTION: The ceramic structure includes a base and a thermoelectric element having a portion in contact with the base. The base is a ceramic comprising aluminum oxide. The thermoelectric element includes a conductor part which is a fired body mainly composed of an alloy of tungsten and rhenium and containing nickel oxide, aluminum oxide, and silicon dioxide.SELECTED DRAWING: Figure 1
【課題】セラミックスと熱電素子との密着性を向上したセラミックス構造体を提供する。【解決手段】本セラミックス構造体は、基体と、前記基体と接する部分を有する熱電素子と、を有し、前記基体は、酸化アルミニウムからなるセラミックスであり、前記熱電素子は、タングステンとレニウムとの合金を主成分とし、酸化ニッケル、酸化アルミニウム、二酸化ケイ素を含む焼成体である導体部を含むセラミックス構造体。【選択図】図１
CERAMIC STRUCTURE, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
To provide a ceramic structure improved in adhesion between a ceramic and a thermoelectric element.SOLUTION: The ceramic structure includes a base and a thermoelectric element having a portion in contact with the base. The base is a ceramic comprising aluminum oxide. The thermoelectric element includes a conductor part which is a fired body mainly composed of an alloy of tungsten and rhenium and containing nickel oxide, aluminum oxide, and silicon dioxide.SELECTED DRAWING: Figure 1
【課題】セラミックスと熱電素子との密着性を向上したセラミックス構造体を提供する。【解決手段】本セラミックス構造体は、基体と、前記基体と接する部分を有する熱電素子と、を有し、前記基体は、酸化アルミニウムからなるセラミックスであり、前記熱電素子は、タングステンとレニウムとの合金を主成分とし、酸化ニッケル、酸化アルミニウム、二酸化ケイ素を含む焼成体である導体部を含むセラミックス構造体。【選択図】図１
CERAMIC STRUCTURE, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
セラミックス構造体、静電チャック、基板固定装置
MINEMURA TOMOTAKE (author)
2022-01-20
Patent
Electronic Resource
Japanese
Ceramic structure, electrostatic chuck and substrate fixing device
| European Patent Office | 2023
CERAMIC STRUCTURE, ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
| European Patent Office | 2022