A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
FIRING SETTER
To realize a firing setter of oxide-bonded silicon carbide capable of being thinned.SOLUTION: The firing setter is made up of an oxide-bonded silicon carbide containing SiC particles and SiO2 that binds the SiC particles. The firing setter has a number-based average particle size of SiC particles is 200 μm or less, and a density A1 at a center in a thickness direction and a density A2 at a surface layer in the thickness direction satisfy a following formula (1). 0.8≤A1/A2≤1.1...(1)SELECTED DRAWING: Figure 1
【課題】薄肉化が可能な酸化物結合炭化珪素の焼成用セッターを実現する。【解決手段】焼成用セッターは、ＳｉＣ粒子と、ＳｉＣ粒子を結合するＳｉＯ２を含む酸化物結合炭化珪素質である。この焼成用セッターは、ＳｉＣ粒子の個数平均粒子径が２００μｍ以下であり、厚み方向中央の密度Ａ１と厚み方向表層の密度Ａ２が下記式（１）を満足していている。０．８≦Ａ１／Ａ２≦１．１・・・（１）【選択図】図１
FIRING SETTER
To realize a firing setter of oxide-bonded silicon carbide capable of being thinned.SOLUTION: The firing setter is made up of an oxide-bonded silicon carbide containing SiC particles and SiO2 that binds the SiC particles. The firing setter has a number-based average particle size of SiC particles is 200 μm or less, and a density A1 at a center in a thickness direction and a density A2 at a surface layer in the thickness direction satisfy a following formula (1). 0.8≤A1/A2≤1.1...(1)SELECTED DRAWING: Figure 1
【課題】薄肉化が可能な酸化物結合炭化珪素の焼成用セッターを実現する。【解決手段】焼成用セッターは、ＳｉＣ粒子と、ＳｉＣ粒子を結合するＳｉＯ２を含む酸化物結合炭化珪素質である。この焼成用セッターは、ＳｉＣ粒子の個数平均粒子径が２００μｍ以下であり、厚み方向中央の密度Ａ１と厚み方向表層の密度Ａ２が下記式（１）を満足していている。０．８≦Ａ１／Ａ２≦１．１・・・（１）【選択図】図１
FIRING SETTER
焼成用セッター
KOMIYAMA TSUNEO (author) / MATSUBA HIROOMI (author)
2022-04-11
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME