A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SUBSTRATE HOLDING MEMBER
To provide a substrate holding member capable of reducing variations in specific volume resistance of an electrode in a plurality of products manufactured under the same condition, and facilitating an electrode design.SOLUTION: A substrate holding member 100 comprises: a flat-plate like substrate holding member main body 110 having a substrate mounting surface 112 and made of a ceramic sinter body having an AIN as a main component; and an electrode 120 formed of mesh made by weaving wires, and being embedded in the substrate holding member main body 110. The electrode 120 is made of any one or more of W, WC, W2C, Mo, MoC, or Mo2C as a main component, and contains a rare earth element. A line diameter of the wire is 0.02 mm or more and 0.15 mm or less.SELECTED DRAWING: Figure 1
【課題】同一条件で製造した複数の製品における電極の体積抵抗率のバラツキを低減させることができ、電極設計が容易である基板保持部材を提供する。【解決手段】基板保持部材１００であって、基板載置面１１２を有し、ＡｌＮを主成分とするセラミックス焼結体からなる平板状の基板保持部材本体１１０と、ワイヤーを織り込んだメッシュで形成され、前記基板保持部材本体１１０に埋設された電極１２０と、を備え、前記電極１２０は、Ｗ、ＷＣ、Ｗ２Ｃ、Ｍｏ、ＭｏＣ、またはＭｏ２Ｃのいずれか１つ以上を主成分とし、希土類元素を含み、前記ワイヤーは、線径が０．０２ｍｍ以上０．１５ｍｍ以下である。【選択図】図１
SUBSTRATE HOLDING MEMBER
To provide a substrate holding member capable of reducing variations in specific volume resistance of an electrode in a plurality of products manufactured under the same condition, and facilitating an electrode design.SOLUTION: A substrate holding member 100 comprises: a flat-plate like substrate holding member main body 110 having a substrate mounting surface 112 and made of a ceramic sinter body having an AIN as a main component; and an electrode 120 formed of mesh made by weaving wires, and being embedded in the substrate holding member main body 110. The electrode 120 is made of any one or more of W, WC, W2C, Mo, MoC, or Mo2C as a main component, and contains a rare earth element. A line diameter of the wire is 0.02 mm or more and 0.15 mm or less.SELECTED DRAWING: Figure 1
【課題】同一条件で製造した複数の製品における電極の体積抵抗率のバラツキを低減させることができ、電極設計が容易である基板保持部材を提供する。【解決手段】基板保持部材１００であって、基板載置面１１２を有し、ＡｌＮを主成分とするセラミックス焼結体からなる平板状の基板保持部材本体１１０と、ワイヤーを織り込んだメッシュで形成され、前記基板保持部材本体１１０に埋設された電極１２０と、を備え、前記電極１２０は、Ｗ、ＷＣ、Ｗ２Ｃ、Ｍｏ、ＭｏＣ、またはＭｏ２Ｃのいずれか１つ以上を主成分とし、希土類元素を含み、前記ワイヤーは、線径が０．０２ｍｍ以上０．１５ｍｍ以下である。【選択図】図１
SUBSTRATE HOLDING MEMBER
基板保持部材
OKI KEISUKE (author) / MORITA NAOTOSHI (author) / SAKAMAKI RYUNOSUKE (author) / WATANABE HIROFUMI (author)
2022-05-02
Patent
Electronic Resource
Japanese
SUPPORT MEMBER, SUBSTRATE HOLDING MEMBER, AND MANUFACTURING METHOD THEREOF
| European Patent Office | 2022
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
| European Patent Office | 2022