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A platform for research: civil engineering, architecture and urbanism
PIEZOELECTRIC SUBSTRATE, PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
To provide a piezoelectric substrate capable of obtaining piezoelectric elements with good piezoelectric properties even in an atmospheric atmosphere.SOLUTION: A piezoelectric substrate includes a substrate, a first electrode formed on the substrate, and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium, and the full width at half maximum of the X-ray intensity peak of the (100) plane of the piezoelectric layer in the scan results in the Psi axis direction of the X-ray diffraction measurement in which X-rays are irradiated at an angle of 54.74° from the vertical direction to the surface of the piezoelectric layer, is greater than 0° and less than or equal to 1.2°.SELECTED DRAWING: Figure 13
【課題】大気雰囲気であっても良好な圧電特性を有する圧電素子を得ることのできる圧電基板を提供する。【解決手段】基板と、前記基板上に形成された第１電極と、前記第１電極上に形成され、カリウムとナトリウムとニオブとを含む圧電体層と、を含み、前記圧電体層の表面に対して垂直方向から５４．７４°傾けてＸ線を照射したＸ線回折測定のＰｓｉ軸方向のスキャン結果における前記圧電体層の（１００）面のＸ線強度ピークの半値幅が０°より大きく１．２°以下である、圧電基板。【選択図】図１３
PIEZOELECTRIC SUBSTRATE, PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
To provide a piezoelectric substrate capable of obtaining piezoelectric elements with good piezoelectric properties even in an atmospheric atmosphere.SOLUTION: A piezoelectric substrate includes a substrate, a first electrode formed on the substrate, and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium, and the full width at half maximum of the X-ray intensity peak of the (100) plane of the piezoelectric layer in the scan results in the Psi axis direction of the X-ray diffraction measurement in which X-rays are irradiated at an angle of 54.74° from the vertical direction to the surface of the piezoelectric layer, is greater than 0° and less than or equal to 1.2°.SELECTED DRAWING: Figure 13
【課題】大気雰囲気であっても良好な圧電特性を有する圧電素子を得ることのできる圧電基板を提供する。【解決手段】基板と、前記基板上に形成された第１電極と、前記第１電極上に形成され、カリウムとナトリウムとニオブとを含む圧電体層と、を含み、前記圧電体層の表面に対して垂直方向から５４．７４°傾けてＸ線を照射したＸ線回折測定のＰｓｉ軸方向のスキャン結果における前記圧電体層の（１００）面のＸ線強度ピークの半値幅が０°より大きく１．２°以下である、圧電基板。【選択図】図１３
PIEZOELECTRIC SUBSTRATE, PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
圧電基板、圧電素子及び液体吐出ヘッド
HAMADA YASUAKI (author) / SAKAI TOMOHIRO (author) / SHIMIZU TOSHIHIRO (author) / NAKAYAMA MASAO (author)
2023-07-05
Patent
Electronic Resource
Japanese
PIEZOELECTRIC MATERIAL, PIEZOELECTRIC ELEMENT, AND LIQUID DISCHARGE HEAD
| European Patent Office | 2023
European Patent Office | 2016
| European Patent Office | 2016
| European Patent Office | 2019