A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SINTERED BODY AND PARTS INCLUDING THE SAME
To provide a sintered body having improved plasma etching resistance and capable of inducing a uniform plasma distribution on an etching target, and parts including the same.SOLUTION: The sintered body contains boron carbide, where the volume ratio of crystal grains having crystal grain size greater than 30 μm and less than or equal to 60 μm is from 50% to 70% based on the total volume of the crystal grains, and where the carbon content is 30 wt.% to 43 wt.% based on the total weight according to X-ray fluorescence spectrometry.SELECTED DRAWING: None
【課題】エッチング対象に均一なプラズマ分布を誘導することができ、プラズマ耐エッチング性が向上した焼結体及びこれを含む部品を提供する。【解決手段】焼結体は、炭化ホウ素を含み、全結晶粒に対して結晶粒サイズが３０μｍ超６０μｍ以下である結晶粒の体積比が５０％～７０％であり、Ｘ線蛍光分析による、全体に対する炭素の含量が３０重量％～４３重量％である。【選択図】なし
SINTERED BODY AND PARTS INCLUDING THE SAME
To provide a sintered body having improved plasma etching resistance and capable of inducing a uniform plasma distribution on an etching target, and parts including the same.SOLUTION: The sintered body contains boron carbide, where the volume ratio of crystal grains having crystal grain size greater than 30 μm and less than or equal to 60 μm is from 50% to 70% based on the total volume of the crystal grains, and where the carbon content is 30 wt.% to 43 wt.% based on the total weight according to X-ray fluorescence spectrometry.SELECTED DRAWING: None
【課題】エッチング対象に均一なプラズマ分布を誘導することができ、プラズマ耐エッチング性が向上した焼結体及びこれを含む部品を提供する。【解決手段】焼結体は、炭化ホウ素を含み、全結晶粒に対して結晶粒サイズが３０μｍ超６０μｍ以下である結晶粒の体積比が５０％～７０％であり、Ｘ線蛍光分析による、全体に対する炭素の含量が３０重量％～４３重量％である。【選択図】なし
SINTERED BODY AND PARTS INCLUDING THE SAME
焼結体及びこれを含む部品
MIN KYUNGYEOL (author) / CHOI YONGSOO (author) / HWANG SUNGSIC (author) / KIM KYUNGIN (author) / KANG JUNGKUN (author) / CHAE SU MAN (author)
2024-05-14
Patent
Electronic Resource
Japanese