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VACUUM PUMP AND METHOD FOR OPERATING VACUUM PUMP
To improve a performance of a vacuum pump, in particular a turbo molecular pump, having a housing and at least one pump stage provided in the housing, in which the pump stage includes a stator and a rotor which rotates about a rotational axis line relative to the stator during operation and which mutually operates so as to provide a pump action with the stator.SOLUTION: A rotor includes at least one rotor component made of a ceramic material.SELECTED DRAWING: Figure 1
【課題】ハウジングとハウジング内に配置された少なくとも１つのポンプ段とを備え、ポンプ段は、ステータと、運転時にステータに対して相対的に回転軸線を中心に回転するとともにステータとポンプ作用を奏するように相互作用するロータとを有する、真空ポンプ、特にターボ分子ポンプの性能を高める。【解決手段】ロータは、セラミックス材料から製作された少なくとも１つのロータ部品を有する。【選択図】図１
VACUUM PUMP AND METHOD FOR OPERATING VACUUM PUMP
To improve a performance of a vacuum pump, in particular a turbo molecular pump, having a housing and at least one pump stage provided in the housing, in which the pump stage includes a stator and a rotor which rotates about a rotational axis line relative to the stator during operation and which mutually operates so as to provide a pump action with the stator.SOLUTION: A rotor includes at least one rotor component made of a ceramic material.SELECTED DRAWING: Figure 1
【課題】ハウジングとハウジング内に配置された少なくとも１つのポンプ段とを備え、ポンプ段は、ステータと、運転時にステータに対して相対的に回転軸線を中心に回転するとともにステータとポンプ作用を奏するように相互作用するロータとを有する、真空ポンプ、特にターボ分子ポンプの性能を高める。【解決手段】ロータは、セラミックス材料から製作された少なくとも１つのロータ部品を有する。【選択図】図１
VACUUM PUMP AND METHOD FOR OPERATING VACUUM PUMP
真空ポンプ及び真空ポンプを運転する方法
NIKLAS WIRTH (author)
2024-07-11
Patent
Electronic Resource
Japanese
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