A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
To provide a technique for joining an AlN ceramic member and a SiC ceramic member which are two kinds of ceramic members different from each other and having different CTE.SOLUTION: In a joined body 100, an AlN ceramic member 110, buffer members 131, 132, and a SiC ceramic member 120 are laminated and joined together in this order. Also, mean coefficients of linear expansion at 20°C to a temperature corresponding to joined states of these members become lower in this order. Also, among the AlN ceramic member 110, the buffer members 131, 132, and the SiC ceramic member 120, a difference of mean coefficients of linear expansion between neighboring two members is 0.8 ppm or under.SELECTED DRAWING: Figure 2
【課題】互いにＣＴＥの異なる２種類の異なるセラミックス部材であるＡｌＮセラミックス部材とＳｉＣセラミックス部材を接合するための技術を提供する。【解決手段】接合体１００において、ＡｌＮセラミックス部材１１０と緩衝部材１３１、１３２とＳｉＣセラミックス部材１２０とがこの順に積層され接合されている。また、これらの部材の２０℃から接合状態に対応した温度の平均線膨張係数は、この順に小さくなっている。また、ＡｌＮセラミックス部材１１０、緩衝部材１３１、１３２、ＳｉＣセラミックス部材１２０のうち、隣接する二部材の平均線膨張係数差が０．８ｐｐｍ以下である。【選択図】 図２
To provide a technique for joining an AlN ceramic member and a SiC ceramic member which are two kinds of ceramic members different from each other and having different CTE.SOLUTION: In a joined body 100, an AlN ceramic member 110, buffer members 131, 132, and a SiC ceramic member 120 are laminated and joined together in this order. Also, mean coefficients of linear expansion at 20°C to a temperature corresponding to joined states of these members become lower in this order. Also, among the AlN ceramic member 110, the buffer members 131, 132, and the SiC ceramic member 120, a difference of mean coefficients of linear expansion between neighboring two members is 0.8 ppm or under.SELECTED DRAWING: Figure 2
【課題】互いにＣＴＥの異なる２種類の異なるセラミックス部材であるＡｌＮセラミックス部材とＳｉＣセラミックス部材を接合するための技術を提供する。【解決手段】接合体１００において、ＡｌＮセラミックス部材１１０と緩衝部材１３１、１３２とＳｉＣセラミックス部材１２０とがこの順に積層され接合されている。また、これらの部材の２０℃から接合状態に対応した温度の平均線膨張係数は、この順に小さくなっている。また、ＡｌＮセラミックス部材１１０、緩衝部材１３１、１３２、ＳｉＣセラミックス部材１２０のうち、隣接する二部材の平均線膨張係数差が０．８ｐｐｍ以下である。【選択図】 図２
JOINED BODY AND SiC-BASED MEMBER
接合体及びＳｉＣ基質部材
TAKAHASHI YUKI (author)
2024-08-15
Patent
Electronic Resource
Japanese
JOINED BODY INCLUDING CERAMIC MEMBER AND METALLIC MEMBER AND METHOD FOR MANUFACTURING JOINED BODY
| European Patent Office | 2017