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Manufacturing Method Of A High-Purity Electrostatic Chuck And Using Press Bonding And the Electrastatic Chuck
Disclosed is a manufacturing method of a high-purity electrostatic chuck, which overlaps a second sintered body having slightly lower purity than a first sintered body with the first sintered body and allows the sintered bodies to be bonded in a liquid state by a molten material of a sintering aid contained in the second sintered body in a state of pressurizing the overlapped sintered bodies at a high temperature. A bonding surface between the sintered bodies is continued without being separated and bending deflection caused by a difference of a thermal expansion coefficient can be reduced.
고순도의 제1 소결체와 제1 소결체보다는 순도가 다소 낮은 제2 소결체를 중첩하고, 중첩된 소결체들을 고온에서 가압한 상태에서 제2 소결체에 함유된 소결 보조제의 용융물에 의해 소결체들이 액상 접합되도록 하는 고순도 정전척 제조방법이 소개된다. 소결체들 간의 접합면은 분리되지 않고 연속되며, 열팽창 계수 차이로 인한 휨변형이 저감될 수 있다.
Manufacturing Method Of A High-Purity Electrostatic Chuck And Using Press Bonding And the Electrastatic Chuck
Disclosed is a manufacturing method of a high-purity electrostatic chuck, which overlaps a second sintered body having slightly lower purity than a first sintered body with the first sintered body and allows the sintered bodies to be bonded in a liquid state by a molten material of a sintering aid contained in the second sintered body in a state of pressurizing the overlapped sintered bodies at a high temperature. A bonding surface between the sintered bodies is continued without being separated and bending deflection caused by a difference of a thermal expansion coefficient can be reduced.
고순도의 제1 소결체와 제1 소결체보다는 순도가 다소 낮은 제2 소결체를 중첩하고, 중첩된 소결체들을 고온에서 가압한 상태에서 제2 소결체에 함유된 소결 보조제의 용융물에 의해 소결체들이 액상 접합되도록 하는 고순도 정전척 제조방법이 소개된다. 소결체들 간의 접합면은 분리되지 않고 연속되며, 열팽창 계수 차이로 인한 휨변형이 저감될 수 있다.
Manufacturing Method Of A High-Purity Electrostatic Chuck And Using Press Bonding And the Electrastatic Chuck
가압접합에 의한 고순도 정전척 제조방법 및 그 정전척
KIM SUNG HWAN (author)
2019-06-25
Patent
Electronic Resource
Korean
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
B23Q
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
,
Einzelheiten, Bestandteile oder Zubehör für Werkzeugmaschinen, z.B. Anordnungen zum Kopieren oder Steuern
/
C04B
Kalk
,
LIME
/
H02N
Elektrische Maschinen, soweit nicht anderweitig vorgesehen
,
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
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