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A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION
물품은 세라믹 코팅으로 코팅된 바디(body)를 포함한다. 세라믹 코팅은 약 45 mol% 내지 약 99 mol% 범위의 YO, 약 0 mol% 내지 약 55 mol% 범위의 ZrO, 및 약 0 mol% 내지 약 10 mol% 범위의 AlO을 포함할 수 있다. 세라믹 코팅은 대안적으로, 약 30 mol% 내지 약 60 mol% 범위의 YO, 약 0 mol% 내지 약 20 mol% 범위의 ZrO, 및 약 30 mol% 내지 약 60 mol% 범위의 AlO을 포함할 수 있다.
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION
물품은 세라믹 코팅으로 코팅된 바디(body)를 포함한다. 세라믹 코팅은 약 45 mol% 내지 약 99 mol% 범위의 YO, 약 0 mol% 내지 약 55 mol% 범위의 ZrO, 및 약 0 mol% 내지 약 10 mol% 범위의 AlO을 포함할 수 있다. 세라믹 코팅은 대안적으로, 약 30 mol% 내지 약 60 mol% 범위의 YO, 약 0 mol% 내지 약 20 mol% 범위의 ZrO, 및 약 30 mol% 내지 약 60 mol% 범위의 AlO을 포함할 수 있다.
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION
반도체 적용을 위한 희토류 옥사이드 기반 내침식성 코팅
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author) / CHO TOM (author)
2015-10-14
Patent
Electronic Resource
Korean
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