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Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

KIM IN HYE / KIM HYO JUNG / YOON SUN HO / KIM CHANG HOON

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

본 발명의 일 실시 형태에 따른 세라믹 조성물은 AlO를 주성분으로 하며, 제1 부성분인 SiO를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

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Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

KIM IN HYE / KIM HYO JUNG / YOON SUN HO / KIM CHANG HOON

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

본 발명의 일 실시 형태에 따른 세라믹 조성물은 AlO를 주성분으로 하며, 제1 부성분인 SiO를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

KIM IN HYE / KIM HYO JUNG / YOON SUN HO / KIM CHANG HOON

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

본 발명의 일 실시 형태에 따른 세라믹 조성물은 AlO를 주성분으로 하며, 제1 부성분인 SiO를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

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Title:

Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

Additional title:

세라믹 조성물, 정전척 및 정전척의 제조방법

Contributors:

KIM IN HYE (author) / KIM HYO JUNG (author) / YOON SUN HO (author) / KIM CHANG HOON (author)

Publication date:

2017-08-04

Type of media:

Patent

Type of material:

Electronic Resource

Language:

Korean

Classification:

IPC: C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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