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Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
A chamber component for a processing chamber includes a ceramic body consisting of a sintered ceramic material essentially consisting of one or more phases of Y_2O_3-ZrO_2. The ceramic material essentially consists of 55-65 mol % Y_2O_3 and 35-45 mol % ZrO_2.
프로세싱 챔버를 위한 챔버 컴포넌트는 YO-ZrO의 하나 이상의 상으로 본질적으로 구성된 소결된 세라믹 재료로 구성된 세라믹 바디를 포함한다. 세라믹 재료는 55-65 mol% YO및 35-45 mol% ZrO로 본질적으로 구성된다.
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
A chamber component for a processing chamber includes a ceramic body consisting of a sintered ceramic material essentially consisting of one or more phases of Y_2O_3-ZrO_2. The ceramic material essentially consists of 55-65 mol % Y_2O_3 and 35-45 mol % ZrO_2.
프로세싱 챔버를 위한 챔버 컴포넌트는 YO-ZrO의 하나 이상의 상으로 본질적으로 구성된 소결된 세라믹 재료로 구성된 세라믹 바디를 포함한다. 세라믹 재료는 55-65 mol% YO및 35-45 mol% ZrO로 본질적으로 구성된다.
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
플라즈마 환경들 내의 챔버 컴포넌트들을 위한 Y2O3-ZrO2 부식 저항성 재료
SUN JENNIFER Y (author) / FENWICK DAVID (author)
2019-09-18
Patent
Electronic Resource
Korean
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