A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD FOR MANUFACTURING OF CERAMIC TARGET AND CERAMIC TARGET MADE THEREFROM
The present invention relates to a method for manufacturing a ceramic target comprising a step of extrusion molding a mixture of ceramic powder and a nanoparticle suspension, and a ceramic target manufactured therefrom. According to the present invention, the nanoparticle suspension is mixed with the ceramic powder and the mixture is extraction molded, thereby obtaining a long green body having high relative density. The green body is plasticized, thereby manufacturing a ceramic target having high relative density. The ceramic target obtained therefrom can be used as a sputtering target material which is advantageous in a sputtering technique based on high density thereof.
본 발명은 세라믹분말과 나노입자현탁액의 혼합물을 압출 성형 및 소성하는 단계를 포함하는 세라믹 타겟의 제조방법 및 이로부터 제조된 세라믹 타겟에 관한 것이다. 본 발명에서는 상기 세라믹분말에 나노입자현탁액을 혼합하여 압출함으로써 상대밀도가 높은 장척의 그린 바디를 얻고 이 그린 바디를 소성하여 상대밀도가 높은 세라믹 타겟을 제조할 수 있다. 이렇게 하여 얻은 세라믹 타겟은, 높은 밀도로 인하여, 스퍼터링 공법에서 유리한 스퍼터링 타겟 재료로서 사용될 수 있다.
METHOD FOR MANUFACTURING OF CERAMIC TARGET AND CERAMIC TARGET MADE THEREFROM
The present invention relates to a method for manufacturing a ceramic target comprising a step of extrusion molding a mixture of ceramic powder and a nanoparticle suspension, and a ceramic target manufactured therefrom. According to the present invention, the nanoparticle suspension is mixed with the ceramic powder and the mixture is extraction molded, thereby obtaining a long green body having high relative density. The green body is plasticized, thereby manufacturing a ceramic target having high relative density. The ceramic target obtained therefrom can be used as a sputtering target material which is advantageous in a sputtering technique based on high density thereof.
본 발명은 세라믹분말과 나노입자현탁액의 혼합물을 압출 성형 및 소성하는 단계를 포함하는 세라믹 타겟의 제조방법 및 이로부터 제조된 세라믹 타겟에 관한 것이다. 본 발명에서는 상기 세라믹분말에 나노입자현탁액을 혼합하여 압출함으로써 상대밀도가 높은 장척의 그린 바디를 얻고 이 그린 바디를 소성하여 상대밀도가 높은 세라믹 타겟을 제조할 수 있다. 이렇게 하여 얻은 세라믹 타겟은, 높은 밀도로 인하여, 스퍼터링 공법에서 유리한 스퍼터링 타겟 재료로서 사용될 수 있다.
METHOD FOR MANUFACTURING OF CERAMIC TARGET AND CERAMIC TARGET MADE THEREFROM
세라믹 타겟의 제조방법 및 이로부터 제조된 세라믹 타겟
JOO AHREUM (author) / KANG DONGHAN (author) / HONG GILSOO (author) / PARK JOOHYEON (author)
2019-12-10
Patent
Electronic Resource
Korean
Ceramic composition and porous light foam ceramic shapes made therefrom
| European Patent Office | 2016
Shaded Zirconia Ceramic Material and Machinable Sintered Ceramic Bodies Made Therefrom
| European Patent Office | 2018
Shaded zirconia ceramic material and machinable sintered ceramic bodies made therefrom
| European Patent Office | 2019