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ALUMINIUM NITRIDE CERAMICS AND MANUFACTURING METHOD THEREOF
According to the present invention, disclosed is an aluminum nitride ceramics composition in which CaCO3·Al2O3·SiO2 glass is added to an aluminum nitride (AlN) ceramic composition to form a solid solution, and a method for manufacturing the same. In particular, the present invention can minimize and suppress each content of residual carbon and residual oxygen inside an AlN substrate produced by a thick film process such as tape casting and sintered without using expensive rare earths such as Y2O3 as a sintering aid. In terms of technology, while improving both the sintering and thermal conductivity properties of the AlN sintered body, the producing costs of an AlN sintered body can be greatly reduced from an economic point of view.
본 발명은 질화알루미늄(AlN) 세라믹스 조성물에 CaCO3·Al2O3·SiO2 글라스가 첨가되어 고용체를 이루는 질화알루미늄 세라믹스 조성물과 그의 제조방법을 개시한다. 특히, 본 발명은 Y2O3 등의 값비싼 희토류를 소결조제로 사용하지 않으면서 테이프캐스팅 등의 후막공정으로 제조되어 소결된 AlN 기판 내부의 잔류 탄소와 잔류 산소의 각 함량을 최소화하고 억제할 수 있음으로써, 기술적 측면에서는 AlN 소결체의 소결성과 열전도도 특성 모두를 개선하는 한편, 경제적 측면에서는 AlN 소결체의 제조단가를 크게 낮출 수 있다.
ALUMINIUM NITRIDE CERAMICS AND MANUFACTURING METHOD THEREOF
According to the present invention, disclosed is an aluminum nitride ceramics composition in which CaCO3·Al2O3·SiO2 glass is added to an aluminum nitride (AlN) ceramic composition to form a solid solution, and a method for manufacturing the same. In particular, the present invention can minimize and suppress each content of residual carbon and residual oxygen inside an AlN substrate produced by a thick film process such as tape casting and sintered without using expensive rare earths such as Y2O3 as a sintering aid. In terms of technology, while improving both the sintering and thermal conductivity properties of the AlN sintered body, the producing costs of an AlN sintered body can be greatly reduced from an economic point of view.
본 발명은 질화알루미늄(AlN) 세라믹스 조성물에 CaCO3·Al2O3·SiO2 글라스가 첨가되어 고용체를 이루는 질화알루미늄 세라믹스 조성물과 그의 제조방법을 개시한다. 특히, 본 발명은 Y2O3 등의 값비싼 희토류를 소결조제로 사용하지 않으면서 테이프캐스팅 등의 후막공정으로 제조되어 소결된 AlN 기판 내부의 잔류 탄소와 잔류 산소의 각 함량을 최소화하고 억제할 수 있음으로써, 기술적 측면에서는 AlN 소결체의 소결성과 열전도도 특성 모두를 개선하는 한편, 경제적 측면에서는 AlN 소결체의 제조단가를 크게 낮출 수 있다.
ALUMINIUM NITRIDE CERAMICS AND MANUFACTURING METHOD THEREOF
질화알루미늄 세라믹스 조성물 및 그의 제조방법
YEO DONG HUN (author) / SHIN HYO SOON (author) / KIM SHI YEON (author) / CHOI DONG KYU (author) / KIM BUM SUP (author) / KWON HYUK CHUN (author)
2021-06-01
Patent
Electronic Resource
Korean
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