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A platform for research: civil engineering, architecture and urbanism
Thin film deposition apparatus having sliding door
The present invention relates to a thin film deposition device having a sliding door, comprising: a vacuum chamber having a space in which a substrate is installed; an opening part formed on the vacuum chamber to allow the substrate to enter and exit; a sliding door for opening and closing the opening part by a sliding action; and a door driving unit that slides and moves the sliding door in an open state of the sliding door and moves the sliding door in a direction toward the opening part to bring the same into close contact with the vacuum chamber. Accordingly, the thin film deposition device having a sliding door is capable of securing sealing performance while automatically opening and closing a door through a sliding method.
본 발명은, 기판이 설치되는 공간을 갖는 진공 챔버와; 상기 기판이 출입할 수 있도록 상기 진공 챔버 상에 형성되는 개구부와; 슬라이딩 동작에 의해 상기 개구부를 개폐하기 위한 슬라이딩 도어; 및 상기 슬라이딩 도어의 개방 상태에서 상기 슬라이딩 도어를 슬라이드 이동시킨 후, 상기 슬라이딩 도어를 상기 개구부를 향하는 방향으로 이동시켜 상기 진공 챔버에 밀착시키는 도어 구동 유닛;을 포함하는, 슬라이딩 도어를 구비하는 박막 증착 장치에 관한 것이다.
Thin film deposition apparatus having sliding door
The present invention relates to a thin film deposition device having a sliding door, comprising: a vacuum chamber having a space in which a substrate is installed; an opening part formed on the vacuum chamber to allow the substrate to enter and exit; a sliding door for opening and closing the opening part by a sliding action; and a door driving unit that slides and moves the sliding door in an open state of the sliding door and moves the sliding door in a direction toward the opening part to bring the same into close contact with the vacuum chamber. Accordingly, the thin film deposition device having a sliding door is capable of securing sealing performance while automatically opening and closing a door through a sliding method.
본 발명은, 기판이 설치되는 공간을 갖는 진공 챔버와; 상기 기판이 출입할 수 있도록 상기 진공 챔버 상에 형성되는 개구부와; 슬라이딩 동작에 의해 상기 개구부를 개폐하기 위한 슬라이딩 도어; 및 상기 슬라이딩 도어의 개방 상태에서 상기 슬라이딩 도어를 슬라이드 이동시킨 후, 상기 슬라이딩 도어를 상기 개구부를 향하는 방향으로 이동시켜 상기 진공 챔버에 밀착시키는 도어 구동 유닛;을 포함하는, 슬라이딩 도어를 구비하는 박막 증착 장치에 관한 것이다.
Thin film deposition apparatus having sliding door
슬라이딩 도어를 구비하는 박막 증착 장치
MIN KYONG HO (author)
2023-02-09
Patent
Electronic Resource
Korean
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
E05D
Scharniere oder andere Aufhängevorrichtungen für Türen, Fenster oder Flügel
,
HINGES OR OTHER SUSPENSION DEVICES FOR DOORS, WINDOWS, OR WINGS
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
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