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Sintered body comprising LiCoO2, sputtering target, and production method for sintered body comprising LiCoO2
Provided is a sintered body comprising LiCoO2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200-1500 cm2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0×102 Ω-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A.
Sintered body comprising LiCoO2, sputtering target, and production method for sintered body comprising LiCoO2
Provided is a sintered body comprising LiCoO2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200-1500 cm2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0×102 Ω-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A.
Sintered body comprising LiCoO2, sputtering target, and production method for sintered body comprising LiCoO2
TAKETOMI YUICHI (author) / KANAMARU MORIYOSHI (author)
2018-07-24
Patent
Electronic Resource
English
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01M
Verfahren oder Mittel, z.B. Batterien, für die direkte Umwandlung von chemischer in elektrische Energie
,
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
European Patent Office | 2017
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