A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Charged particle beam apparatus and sample elevating apparatus
To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with light weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism. The sample lifting and lowering device includes first and second lifting and lowering mechanisms that lift and lower a sample stage to which the sample is fixed, first and second driving devices that drive the first and second lifting and lowering mechanisms to be lifted and lowered individually and a controller that synchronizes lifting/lowering operations of the first and second lifting and lowering mechanisms by the first and second driving devices by first and second control signals, in which the first lifting and lowering mechanism includes a first deceleration mechanism generating a first drive output obtained by decelerating a first drive input given from the first driving device in a direction different from a direction of the input, the second lifting and lowering mechanism includes a second deceleration mechanism generating a second drive output obtained by decelerating a second drive input given from the second driving device in a direction different from a direction of the input, and directions of the first and second drive inputs are different from each other as well as are not on the same straight line.
Charged particle beam apparatus and sample elevating apparatus
To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with light weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism. The sample lifting and lowering device includes first and second lifting and lowering mechanisms that lift and lower a sample stage to which the sample is fixed, first and second driving devices that drive the first and second lifting and lowering mechanisms to be lifted and lowered individually and a controller that synchronizes lifting/lowering operations of the first and second lifting and lowering mechanisms by the first and second driving devices by first and second control signals, in which the first lifting and lowering mechanism includes a first deceleration mechanism generating a first drive output obtained by decelerating a first drive input given from the first driving device in a direction different from a direction of the input, the second lifting and lowering mechanism includes a second deceleration mechanism generating a second drive output obtained by decelerating a second drive input given from the second driving device in a direction different from a direction of the input, and directions of the first and second drive inputs are different from each other as well as are not on the same straight line.
Charged particle beam apparatus and sample elevating apparatus
SUGAYA MASAKAZU (author) / MORIWAKI YUSUKE (author) / TERADA KOICHI (author) / SHIBATA NOBUO (author) / OGAWA HIRONORI (author) / KITSUNAI HIROYUKI (author) / SHIMIZU TOSHIHIKO (author) / NAKAGAWA SHUICHI (author)
2018-12-11
Patent
Electronic Resource
English
IPC:
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
E02B
HYDRAULIC ENGINEERING
,
Wasserbau
/
F41J
TARGETS
,
Ziele
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
/
G21K
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
,
Verfahren und Vorrichtungen zur Handhabung von Teilchen oder ionisierender Strahlung, soweit nicht anderweitig vorgesehen