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Flow path member
In the present disclosure, a flow path member includes a substrate, a flow path and a first oxide layer. The substrate contains non-oxide ceramics, and includes an outer surface. The flow path is in the substrate, and includes an inlet and an outlet. The first oxide layer is disposed on the outer surface.
Flow path member
In the present disclosure, a flow path member includes a substrate, a flow path and a first oxide layer. The substrate contains non-oxide ceramics, and includes an outer surface. The flow path is in the substrate, and includes an inlet and an outlet. The first oxide layer is disposed on the outer surface.
Flow path member
NAKAMURA KIYOTAKA (author) / MORIYAMA MASAYUKI (author) / ISHIMINE YUUSAKU (author)
2020-06-16
Patent
Electronic Resource
English