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PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
A piezoelectric thin film is formed by adding a donor element to lead zirconate titanate. In the piezoelectric thin film, a molar ratio of lead to a total sum of zirconium and titanium is 105% or higher, and, when positive and negative coercive electric fields in polarization and electric field hysteresis are referred to as Ec (+) and Ec (−), respectively, a value of |Ec (+)|/|Ec (−)| is 0.5 or more and 1.5 or less.
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
A piezoelectric thin film is formed by adding a donor element to lead zirconate titanate. In the piezoelectric thin film, a molar ratio of lead to a total sum of zirconium and titanium is 105% or higher, and, when positive and negative coercive electric fields in polarization and electric field hysteresis are referred to as Ec (+) and Ec (−), respectively, a value of |Ec (+)|/|Ec (−)| is 0.5 or more and 1.5 or less.
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
MAWATARI KENJI (author)
2018-06-21
Patent
Electronic Resource
English
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