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CERAMIC LAMINATE
The ceramic laminate 1 according to the present invention is a ceramic laminate in which a ceramic film 3 is formed on a metal layer 2, wherein the ceramic film 3 has a minimum film thickness of 1 μm or more, contains silicon nitride and inevitable impurities, and has silicon nitride crystal grains having an average grain size of 300 nm or less in the film thickness direction and an average grain size of 500 nm or less in the in-plane direction. As a result, the present invention can provide a ceramic laminate having excellent mechanical properties, heat dissipation property, insulating property, heat resistance and anti-reactivity, and particularly an insulative heat dissipating body having an excellent thermal cycle reliability and a high withstand voltage.
CERAMIC LAMINATE
The ceramic laminate 1 according to the present invention is a ceramic laminate in which a ceramic film 3 is formed on a metal layer 2, wherein the ceramic film 3 has a minimum film thickness of 1 μm or more, contains silicon nitride and inevitable impurities, and has silicon nitride crystal grains having an average grain size of 300 nm or less in the film thickness direction and an average grain size of 500 nm or less in the in-plane direction. As a result, the present invention can provide a ceramic laminate having excellent mechanical properties, heat dissipation property, insulating property, heat resistance and anti-reactivity, and particularly an insulative heat dissipating body having an excellent thermal cycle reliability and a high withstand voltage.
CERAMIC LAMINATE
TOKUHASHI KEISUKE (author) / KIMURA KEIICHI (author) / UNO TOMOHIRO (author) / SATO YUTAKA (author)
2019-02-28
Patent
Electronic Resource
English
LAMINATE CERAMIC CAPACITOR AND MANUFACTURING METHOD OF LAMINATE CERAMIC CAPACITOR
European Patent Office | 2016
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