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METHOD FOR PRODUCING HERMETIC PACKAGE, AND HERMETIC PACKAGE
A method of producing a hermetic package of the present invention includes the steps of: preparing an aluminum nitride base, and forming a sintered glass-containing layer on the aluminum nitride base; preparing a glass cover, and forming a sealing material layer on the glass cover; arranging the aluminum nitride base and the glass cover so that the sintered glass-containing layer and the sealing material layer are brought into contact with each other; and irradiating the sealing material layer with laser light from a glass cover side to soften and deform the sealing material layer, to thereby hermetically seal the sintered glass-containing layer and the sealing material layer with each other to obtain a hermetic package.
METHOD FOR PRODUCING HERMETIC PACKAGE, AND HERMETIC PACKAGE
A method of producing a hermetic package of the present invention includes the steps of: preparing an aluminum nitride base, and forming a sintered glass-containing layer on the aluminum nitride base; preparing a glass cover, and forming a sealing material layer on the glass cover; arranging the aluminum nitride base and the glass cover so that the sintered glass-containing layer and the sealing material layer are brought into contact with each other; and irradiating the sealing material layer with laser light from a glass cover side to soften and deform the sealing material layer, to thereby hermetically seal the sintered glass-containing layer and the sealing material layer with each other to obtain a hermetic package.
METHOD FOR PRODUCING HERMETIC PACKAGE, AND HERMETIC PACKAGE
SHIRAGAMI TORU (author) / OKA TAKUJI (author)
2019-04-25
Patent
Electronic Resource
English
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