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A platform for research: civil engineering, architecture and urbanism
SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE SAME, AND BREAK FILTER USING THE SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE BREAK FILTER
A silicon carbide porous body includes a skeletal structure formed by a plurality of silicon carbide particles bonded to each other, a plurality of pores formed by the skeletal structure, neck parts formed by surface-contacting of adjacent silicon carbide particles, and an average pore size is larger than 3 μm and equal to or smaller than 9 μm, and a porosity ranges from 35% to 55%. A break filter using the silicon carbide porous body enables high performance of collection of particles, prevention of soaring up of particles, and shortening of a restoration time from the depressurized state of the chamber to the atmospheric state.
SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE SAME, AND BREAK FILTER USING THE SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE BREAK FILTER
A silicon carbide porous body includes a skeletal structure formed by a plurality of silicon carbide particles bonded to each other, a plurality of pores formed by the skeletal structure, neck parts formed by surface-contacting of adjacent silicon carbide particles, and an average pore size is larger than 3 μm and equal to or smaller than 9 μm, and a porosity ranges from 35% to 55%. A break filter using the silicon carbide porous body enables high performance of collection of particles, prevention of soaring up of particles, and shortening of a restoration time from the depressurized state of the chamber to the atmospheric state.
SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE SAME, AND BREAK FILTER USING THE SILICON CARBIDE POROUS BODY AND MANUFACTURING METHOD OF THE BREAK FILTER
FUKUOKA SEIICHI (author) / WATANABE HIROKI (author)
2019-09-19
Patent
Electronic Resource
English
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