A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC SUBSTRATE AND ELECTROSTATIC CHUCK
A ceramic substrate includes a substrate main body, and a conductor layer provided inside of the substrate main body. The substrate main body includes an insulator layer that is ceramics composed of aluminum oxide, and a composite oxide layer of aluminum and silicon, the composite oxide layer being formed between the insulator layer and the conductor layer.
CERAMIC SUBSTRATE AND ELECTROSTATIC CHUCK
A ceramic substrate includes a substrate main body, and a conductor layer provided inside of the substrate main body. The substrate main body includes an insulator layer that is ceramics composed of aluminum oxide, and a composite oxide layer of aluminum and silicon, the composite oxide layer being formed between the insulator layer and the conductor layer.
CERAMIC SUBSTRATE AND ELECTROSTATIC CHUCK
MINEMURA TOMOTAKE (author)
2021-08-12
Patent
Electronic Resource
English
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