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A ceramic tube contains yttrium oxide as a main component, in which the section height difference (Rδc) of the roughness profile of an inner peripheral surface, which represents a difference between a section level at a load length ratio of 25% in the roughness profile and a section level at load length ratio of 75% in the roughness profile, is 2 μm or less and a coefficient of variation of the section height difference (Rδc) is 0.05 to 0.6.
A ceramic tube contains yttrium oxide as a main component, in which the section height difference (Rδc) of the roughness profile of an inner peripheral surface, which represents a difference between a section level at a load length ratio of 25% in the roughness profile and a section level at load length ratio of 75% in the roughness profile, is 2 μm or less and a coefficient of variation of the section height difference (Rδc) is 0.05 to 0.6.
CERAMIC TUBE
TANAKA MANPEI (author)
2021-12-16
Patent
Electronic Resource
English
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