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PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
Piezoelectric nitride compound materials with improved properties are provided. The piezoelectric material comprises aluminum, nitrogen and binary and ternary dopants that can be selected from silver, niobium and/or scandium or from silver and/or niobium.
PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
Piezoelectric nitride compound materials with improved properties are provided. The piezoelectric material comprises aluminum, nitrogen and binary and ternary dopants that can be selected from silver, niobium and/or scandium or from silver and/or niobium.
PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
KOUTSAROFF IVOYL (author) / HONTGAS CHRISTOPHER HAYDEN (author)
2022-02-03
Patent
Electronic Resource
English
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