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HAFNIUM CARBIDE POWDER FOR PLASMA ELECTRODES, METHOD FOR PRODUCING SAME, HAFNIUM CARBIDE SINTERED BODY, AND PLASMA ELECTRODE
Hafnium carbide powder for plasma electrodes is represented by a chemical formula HfCx (where x=0.5 to 1.0). The content of carbon particles contained as impurities in the hafnium carbide powder is less than or equal to 0.03% by mass. The hafnium carbide powder preferably has an average particle size of 0.5 to 2 μm. To produce the hafnium carbide powder, a pellet made from mixed powder of hafnium oxide and carbon is first placed in a second crucible made of silicon carbide. Then, the hafnium carbide powder is formed by heating the second crucible at 1800 to 2000° C. with the second crucible arranged in a first crucible made of carbon.
HAFNIUM CARBIDE POWDER FOR PLASMA ELECTRODES, METHOD FOR PRODUCING SAME, HAFNIUM CARBIDE SINTERED BODY, AND PLASMA ELECTRODE
Hafnium carbide powder for plasma electrodes is represented by a chemical formula HfCx (where x=0.5 to 1.0). The content of carbon particles contained as impurities in the hafnium carbide powder is less than or equal to 0.03% by mass. The hafnium carbide powder preferably has an average particle size of 0.5 to 2 μm. To produce the hafnium carbide powder, a pellet made from mixed powder of hafnium oxide and carbon is first placed in a second crucible made of silicon carbide. Then, the hafnium carbide powder is formed by heating the second crucible at 1800 to 2000° C. with the second crucible arranged in a first crucible made of carbon.
HAFNIUM CARBIDE POWDER FOR PLASMA ELECTRODES, METHOD FOR PRODUCING SAME, HAFNIUM CARBIDE SINTERED BODY, AND PLASMA ELECTRODE
IHARA DAISUKE (author) / SANO YOSHIMI (author) / YOSHIMOTO HIROHUMI (author) / SHIMIZU HIDEAKI (author) / HASHIMOTO HIDEAKI (author) / TAKEUCHI AKIHIRO (author) / HIGASHIMOTO KIYOFUMI (author)
2022-06-16
Patent
Electronic Resource
English
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