A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD OF FORMING A SUBSTRATE COMPRISING A TITANIUM LAYER OR FOIL COVERED WITH A TITANIUM OXIDE LAYER COVERED WITH A HIGH K CERAMIC, ELECTRODE, CAPACITOR, MUTILAYER CAPACITOR AND MEDICAL DEVICE USING IT
The present invention concerns a substrate (2) for the deposition of a thin film (5) comprising a base layer (3) based on titanium foil and an intermediate (4) layer based on titanium oxide. The titanium oxide layer being build on the titanium foil. Further, a thin film ceramic layer (5) (high k dielectric layer type Barium Titanate (BZT)) can be deposited on the intermediate layer (4). Further, the invention concerns a thin film device (2) comprising the substrate (2) and a ceramic thin film layer (5) and a manufacturing method. Further, the application discloses, an electrode, a capacitor, a multilayer capacitor and a medical device comprising the based layer (3), the intermediate layer (4) and the ceramic layer.
La présente invention concerne un substrat (2) pour le dépôt d'un film mince (5) comprenant une couche de base (3) comportant du titane et une couche intermédiaire (4) comportant de l'oxyde de titane. Le substrat (2) est conçu de telle sorte qu'une couche céramique à film mince (5) peut être déposée sur la couche intermédiaire. En outre, l'invention concerne un dispositif à film mince (2) comprenant le substrat (2) et une couche de film mince en céramique (5), ainsi qu'un procédé de fabrication.
METHOD OF FORMING A SUBSTRATE COMPRISING A TITANIUM LAYER OR FOIL COVERED WITH A TITANIUM OXIDE LAYER COVERED WITH A HIGH K CERAMIC, ELECTRODE, CAPACITOR, MUTILAYER CAPACITOR AND MEDICAL DEVICE USING IT
The present invention concerns a substrate (2) for the deposition of a thin film (5) comprising a base layer (3) based on titanium foil and an intermediate (4) layer based on titanium oxide. The titanium oxide layer being build on the titanium foil. Further, a thin film ceramic layer (5) (high k dielectric layer type Barium Titanate (BZT)) can be deposited on the intermediate layer (4). Further, the invention concerns a thin film device (2) comprising the substrate (2) and a ceramic thin film layer (5) and a manufacturing method. Further, the application discloses, an electrode, a capacitor, a multilayer capacitor and a medical device comprising the based layer (3), the intermediate layer (4) and the ceramic layer.
La présente invention concerne un substrat (2) pour le dépôt d'un film mince (5) comprenant une couche de base (3) comportant du titane et une couche intermédiaire (4) comportant de l'oxyde de titane. Le substrat (2) est conçu de telle sorte qu'une couche céramique à film mince (5) peut être déposée sur la couche intermédiaire. En outre, l'invention concerne un dispositif à film mince (2) comprenant le substrat (2) et une couche de film mince en céramique (5), ainsi qu'un procédé de fabrication.
METHOD OF FORMING A SUBSTRATE COMPRISING A TITANIUM LAYER OR FOIL COVERED WITH A TITANIUM OXIDE LAYER COVERED WITH A HIGH K CERAMIC, ELECTRODE, CAPACITOR, MUTILAYER CAPACITOR AND MEDICAL DEVICE USING IT
SUBSTRAT POUR FILM MINCE EN CÉRAMIQUE ET DISPOSITIF À FILM MINCE
BENES FEDERICA (author) / STEFFENS MARIUS (author) / SCHWEINZGER MANFRED (author)
2024-08-02
Patent
Electronic Resource
English
Characterization of Ti Substrates Covered with Electrogenerated Titanium Oxide
| British Library Conference Proceedings | 1998