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Vertically oriented TiO2 nanotube arrays prepared by anodic oxidation
Vertically oriented TiO2 nanotube arrays transformed from Ti thin film on silicon substrates are very attractive due to their potential for nanostructure integration on silicon [1]. We fabricated the vertically oriented TiO2 nanotube arrays using Ti thin film anodization under various processing conditions. To obtain the optimum condition for the vertically oriented TiO2 nanotube arrays, the various anodization voltages and temperatures were investigated in aqueous solutions mixed with highly corrosive Na2SO4/NaF/citric acid and NH4F in glycerol (1,2,3-propanetriol). In case of a good quality Ti thin film deposited at 500°C, vertically oriented TiO2 nanotube arrays were formed in NH4F in glycerol (1,2,3-propanetriol) at 20°C FE-SEM images of vertically oriented and highly ordered TiO2 nanotube arrays were shown in Fig. 1. The pore diameter and center to center spacing of nanotube arrays were ~50 nm and ~100 nm, respectively. However, in case of Ti thin film deposited at room temperature, very thin TiO2 layer of ~70 nm with a worm-like structure was grown on the porous layer
Vertically oriented TiO2 nanotube arrays prepared by anodic oxidation
Vertically oriented TiO2 nanotube arrays transformed from Ti thin film on silicon substrates are very attractive due to their potential for nanostructure integration on silicon [1]. We fabricated the vertically oriented TiO2 nanotube arrays using Ti thin film anodization under various processing conditions. To obtain the optimum condition for the vertically oriented TiO2 nanotube arrays, the various anodization voltages and temperatures were investigated in aqueous solutions mixed with highly corrosive Na2SO4/NaF/citric acid and NH4F in glycerol (1,2,3-propanetriol). In case of a good quality Ti thin film deposited at 500°C, vertically oriented TiO2 nanotube arrays were formed in NH4F in glycerol (1,2,3-propanetriol) at 20°C FE-SEM images of vertically oriented and highly ordered TiO2 nanotube arrays were shown in Fig. 1. The pore diameter and center to center spacing of nanotube arrays were ~50 nm and ~100 nm, respectively. However, in case of Ti thin film deposited at room temperature, very thin TiO2 layer of ~70 nm with a worm-like structure was grown on the porous layer
Vertically oriented TiO2 nanotube arrays prepared by anodic oxidation
Dae-Jin Yang, (author) / Ho-Gi Kim, (author) / Seong-Je Cho, (author) / Won-Youl Choi, (author)
2006-10-01
507116 byte
Conference paper
Electronic Resource
English
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