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Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer
In this study, Si/Si pairs were bonded underwater using perhydropolysilazane(PHPS), and the bonding strengths were measured and peeled surfaces were analyzed. As a result, high-strength bonding was obtained while promoting silica conversion of PHPS.
Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer
In this study, Si/Si pairs were bonded underwater using perhydropolysilazane(PHPS), and the bonding strengths were measured and peeled surfaces were analyzed. As a result, high-strength bonding was obtained while promoting silica conversion of PHPS.
Adhesion Between Si Substrates in Liquid Water Using Inorganic Polymer
Nemoto, Daiki (author) / Takeuchi, Kai (author) / Higurashi, Eiji (author)
2024 IEEE CPMT Symposium Japan (ICSJ) ; 168-169
2024-11-13
362530 byte
Conference paper
Electronic Resource
English
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