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Directional Oxygen-Ion-Beam Etching of Carbonaceous Materials

P. D. DeGraff / D. C. Flanders

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Directional Oxygen-Ion-Beam Etching of Carbonaceous Materials

P. D. DeGraff / D. C. Flanders

Directional Oxygen-Ion-Beam Etching of Carbonaceous Materials

P. D. DeGraff / D. C. Flanders

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Document information

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Document information

Title:

Directional Oxygen-Ion-Beam Etching of Carbonaceous Materials

Contributors:

P. D. DeGraff (author) / D. C. Flanders (author)

Publication date:

1979

Size:

4 pages

Type of media:

Report

Type of material:

No indication

Language:

English

Keywords:

Manufacturing Processes & Materials Handling , Ion beams , Oxygen , Directional , Etching , Fabrication , Control , Carbon compounds , Reprints , Ion milling , Carbonaceous materials

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