A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Whiskers, Cones, and Pyramids Created in Sputtering by Ion Bombardment
A thorough study of the role which foreign atoms play in cone formation during sputtering of metals revealed many experimental facts. Two types of cone formation were distinquished, deposit cones and seed cones. Twenty-six combinations of metals for seed cone formation were tested. The sputtering yield variations with composition for combinations which form seed cones were measured. It was demonstrated that whisker growth becomes a common occurrence when low melting point material is sputter deposited on a hot nonsputtered high melting point electrode.
Whiskers, Cones, and Pyramids Created in Sputtering by Ion Bombardment
A thorough study of the role which foreign atoms play in cone formation during sputtering of metals revealed many experimental facts. Two types of cone formation were distinquished, deposit cones and seed cones. Twenty-six combinations of metals for seed cone formation were tested. The sputtering yield variations with composition for combinations which form seed cones were measured. It was demonstrated that whisker growth becomes a common occurrence when low melting point material is sputter deposited on a hot nonsputtered high melting point electrode.
Whiskers, Cones, and Pyramids Created in Sputtering by Ion Bombardment
G. K. Wehner (author)
1979
46 pages
Report
No indication
English
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