A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Metrology for Submicrometer Devices and Structures
This paper examines the types of metrological requirements associated with submicrometer devices and structures, summarizes the present state of the art in selected critical areas of metrology, and reviews current research and development efforts on advanced measurement technology, especially those at the National Bureau of Standards.
Metrology for Submicrometer Devices and Structures
This paper examines the types of metrological requirements associated with submicrometer devices and structures, summarizes the present state of the art in selected critical areas of metrology, and reviews current research and development efforts on advanced measurement technology, especially those at the National Bureau of Standards.
Metrology for Submicrometer Devices and Structures
W. M. Bullis (author)
1979
12 pages
Report
No indication
English
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