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Non-Thermal Laser-Induced Desorption of Compound Semiconductors
Abstract It has been well established that excitation of core electrons produces the sputtering or desorption in wide ranges of metal oxides and adsorbate-substrate systems [1–3]. On the other hand fundamental excitation is known to cause sputtering only in some specific insulators, such as alkali and silver halides [4,5]. Similarly electronic excitation below core-excitation energies causes desorption of neutral or negative species in some specific adsorbate-substrate systems [6–9]. What we deal with in this paper is the sputtering induced by electronic excitation, which belongs neither of the categories described above: the sputtering of compound semiconductors induced by dense fundamental excitation. The intensity of the photon beams employed in the works dealt with in the present paper is much lower than that employed for the laser-annealing experiments [10,11] or than the intensity that causes melting.
Non-Thermal Laser-Induced Desorption of Compound Semiconductors
Abstract It has been well established that excitation of core electrons produces the sputtering or desorption in wide ranges of metal oxides and adsorbate-substrate systems [1–3]. On the other hand fundamental excitation is known to cause sputtering only in some specific insulators, such as alkali and silver halides [4,5]. Similarly electronic excitation below core-excitation energies causes desorption of neutral or negative species in some specific adsorbate-substrate systems [6–9]. What we deal with in this paper is the sputtering induced by electronic excitation, which belongs neither of the categories described above: the sputtering of compound semiconductors induced by dense fundamental excitation. The intensity of the photon beams employed in the works dealt with in the present paper is much lower than that employed for the laser-annealing experiments [10,11] or than the intensity that causes melting.
Non-Thermal Laser-Induced Desorption of Compound Semiconductors
Nakayama, Takeyoshi (author) / Itoh, Noriaki (author)
1985-01-01
8 pages
Article/Chapter (Book)
Electronic Resource
English
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