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Preparation and Patterning of YBa2Cu3Ox Thin Films
Abstract Superconducting YBa2Cu3Ox thin films have been prepared by annealing multilayers deposited by sequential rf diode sputtering of Y2O3, BaF2, and CuO targets. Reactive sputtering of BaF2 in an Ar/O2 atmosphere yields films containing primarily Ba and O. The F concentration in the as-deposited multilayers is so low that wet-O2 annealing, which is necessary to remove F from films deposited from a BaF2 source by other techniques, is not required. The superconducting phase is formed by post-annealing in dry O2 for one hour at 850°C and two hours at 500°C. Films about 1 μm thick on yttria-stabilized zirconia substrates have a zero-resistance transition temperature of 90 K. Pattern definition is accomplished by using a photoresist mask followed by ion milling in an Ar+ beam. Exposure to water is not detrimental to film properties, but some damage due to Ar+ ions is observed after patterning.
Preparation and Patterning of YBa2Cu3Ox Thin Films
Abstract Superconducting YBa2Cu3Ox thin films have been prepared by annealing multilayers deposited by sequential rf diode sputtering of Y2O3, BaF2, and CuO targets. Reactive sputtering of BaF2 in an Ar/O2 atmosphere yields films containing primarily Ba and O. The F concentration in the as-deposited multilayers is so low that wet-O2 annealing, which is necessary to remove F from films deposited from a BaF2 source by other techniques, is not required. The superconducting phase is formed by post-annealing in dry O2 for one hour at 850°C and two hours at 500°C. Films about 1 μm thick on yttria-stabilized zirconia substrates have a zero-resistance transition temperature of 90 K. Pattern definition is accomplished by using a photoresist mask followed by ion milling in an Ar+ beam. Exposure to water is not detrimental to film properties, but some damage due to Ar+ ions is observed after patterning.
Preparation and Patterning of YBa2Cu3Ox Thin Films
Bhushan, M. (author) / Strauss, A. J. (author)
1990-01-01
7 pages
Article/Chapter (Book)
Electronic Resource
English
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