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Abstract In the last two decades ferroelectric thin films (FTFs) have been one of the major fields of research in functional-ceramic materials. Both scientific and technological interests have been driven by the potential applications for these materials, in particular in microelectronics and micro-electromechanical systems (MEMS). Two annual conferences have been devoted to the fundamental and applications issues of FTFs: the Ferroelectric Thin Films Materials Research Society Symposia [1] and the International Symposia on Integrated Ferroelectrics [2].
Abstract In the last two decades ferroelectric thin films (FTFs) have been one of the major fields of research in functional-ceramic materials. Both scientific and technological interests have been driven by the potential applications for these materials, in particular in microelectronics and micro-electromechanical systems (MEMS). Two annual conferences have been devoted to the fundamental and applications issues of FTFs: the Ferroelectric Thin Films Materials Research Society Symposia [1] and the International Symposia on Integrated Ferroelectrics [2].
Ferroelectric Thin Films
2004-01-01
10 pages
Article/Chapter (Book)
Electronic Resource
English
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