A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Scanning Nearfield Acoustic Microscopy
Abstract Scanning Nearfield Acoustic Microscopy (SNAM) is a new method for imaging the topography of non-conducting surfaces using a vibrating tip of high Q as distance sensor. A 32 kHz quartz tuning fork is used as an oscillator driven at resonance by a feedback loop. The feedback signal is used both to excite and to detect the oscillation. An edge of one leg serves as a tip for imaging. If the tip is approached to the surface, the resonance frequency and the oscillation amplitude both decrease. The dependence of this decrease on the gas pressure shows that hydrodynamic forces in the gas and adsorbed vapor films are responsible for the interaction. For imaging, the sensor is piezoelectrically scanned accross the surface. The distance is feedback controlled such that the vibration amplitude stays constant. Using the control signal for imaging, a resolution of 1.5 µm laterally — limited by the tip geometry — and of 10 nm vertically are demonstrated.
Scanning Nearfield Acoustic Microscopy
Abstract Scanning Nearfield Acoustic Microscopy (SNAM) is a new method for imaging the topography of non-conducting surfaces using a vibrating tip of high Q as distance sensor. A 32 kHz quartz tuning fork is used as an oscillator driven at resonance by a feedback loop. The feedback signal is used both to excite and to detect the oscillation. An edge of one leg serves as a tip for imaging. If the tip is approached to the surface, the resonance frequency and the oscillation amplitude both decrease. The dependence of this decrease on the gas pressure shows that hydrodynamic forces in the gas and adsorbed vapor films are responsible for the interaction. For imaging, the sensor is piezoelectrically scanned accross the surface. The distance is feedback controlled such that the vibration amplitude stays constant. Using the control signal for imaging, a resolution of 1.5 µm laterally — limited by the tip geometry — and of 10 nm vertically are demonstrated.
Scanning Nearfield Acoustic Microscopy
Guethner, P. (author) / Schreck, E. (author) / Dransfeld, K. (author) / Fischer, U. Ch. (author)
1990-01-01
8 pages
Article/Chapter (Book)
Electronic Resource
English
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