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Catalytic Effect of Near-Noble Metals on Si Oxidation
Abstract It is well known that Si oxidation is enhanced by the presence of metal atoms, even at RT (room temperature). Up to now only few results are available on the oxygen exposure and metal concentration dependence of this effect, and on the catalytic ability of different metals[1,2] .
Catalytic Effect of Near-Noble Metals on Si Oxidation
Abstract It is well known that Si oxidation is enhanced by the presence of metal atoms, even at RT (room temperature). Up to now only few results are available on the oxygen exposure and metal concentration dependence of this effect, and on the catalytic ability of different metals[1,2] .
Catalytic Effect of Near-Noble Metals on Si Oxidation
Lomellini, P. (author) / Valeri, S. (author)
1985-01-01
3 pages
Article/Chapter (Book)
Electronic Resource
English
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