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Measuring EEDF in Gas Discharge Plasmas
The plasma probe diagnostic is the primary technique for obtaining information concerning the plasma parameters in low pressure gas discharges. In its classical application, known as the Langmuir technique, the probe method allows us to find the basic plasma parameters: the plasma density and the electron temperature. Once these parameters are obtained, we have enough information for the calculation of plasma hydrodynamic processes. The problem arises when one tries to calculate the rates of non-elastic interactions of the plasma electrons with molecules and ions using the measured electron temperature of the low energy electrons.
Measuring EEDF in Gas Discharge Plasmas
The plasma probe diagnostic is the primary technique for obtaining information concerning the plasma parameters in low pressure gas discharges. In its classical application, known as the Langmuir technique, the probe method allows us to find the basic plasma parameters: the plasma density and the electron temperature. Once these parameters are obtained, we have enough information for the calculation of plasma hydrodynamic processes. The problem arises when one tries to calculate the rates of non-elastic interactions of the plasma electrons with molecules and ions using the measured electron temperature of the low energy electrons.
Measuring EEDF in Gas Discharge Plasmas
Auciello, Orlando (editor) / Gras-Marti, Alberto (editor) / Valles-Abarca, Jose Antonia (editor) / Flamm, Daniel L. (editor) / Godyak, V. A. (author)
Plasma-Surface Interactions and Processing of Materials ; Chapter: 4 ; 95-134
NATO ASI Series ; 176
1990-01-01
40 pages
Article/Chapter (Book)
Electronic Resource
English
Probe Characteristic , Langmuir Probe , Electron Energy Distribution Function , Plasma Potential , Probe Voltage Chemistry , Industrial Chemistry/Chemical Engineering , Characterization and Evaluation of Materials , Nuclear Physics, Heavy Ions, Hadrons , Physical Chemistry , Chemistry and Materials Science
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