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RBS, SIMS, AES and ESCA Analysis of Surfaces

Armour, D. G.

Abstract Ion beam and plasma assisted processes have been used to modify thte mechanical, optical and electrical properties of surfaces and surface coatings. While the systems required to produce these property modifications are basically simple, the phenomena associated with the simultaneous deposition of energy and materials are complex. In order to understand, reproduce or optimize the treatment conditions, it is necessary to analyze both the composition and structure of the film or treated surface and to relate these parameters to the specific properties of interest.

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RBS, SIMS, AES and ESCA Analysis of Surfaces

Armour, D. G.

Abstract Ion beam and plasma assisted processes have been used to modify thte mechanical, optical and electrical properties of surfaces and surface coatings. While the systems required to produce these property modifications are basically simple, the phenomena associated with the simultaneous deposition of energy and materials are complex. In order to understand, reproduce or optimize the treatment conditions, it is necessary to analyze both the composition and structure of the film or treated surface and to relate these parameters to the specific properties of interest.

RBS, SIMS, AES and ESCA Analysis of Surfaces

Armour, D. G.

Abstract Ion beam and plasma assisted processes have been used to modify thte mechanical, optical and electrical properties of surfaces and surface coatings. While the systems required to produce these property modifications are basically simple, the phenomena associated with the simultaneous deposition of energy and materials are complex. In order to understand, reproduce or optimize the treatment conditions, it is necessary to analyze both the composition and structure of the film or treated surface and to relate these parameters to the specific properties of interest.

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Title:

RBS, SIMS, AES and ESCA Analysis of Surfaces

Contributors:

Armour, D. G. (author)

Published in:

Plasma-Surface Interactions and Processing of Materials ; 457-498

NATO ASI Series ; 176

Publication date:

1990-01-01

Size:

42 pages

ISBN:

978-94-009-1946-4 , 978-94-010-7369-1

ISSN:

DOI:

https://doi.org/10.1007/978-94-009-1946-4_31

Type of media:

Article/Chapter (Book)

Type of material:

Electronic Resource

Language:

English

Keywords:

Auger Electron Spectroscopy , Depth Resolution , Bombardment Condition , Inelastic Energy Loss , Auger Electron Spectroscopy Spectrum Chemistry , Industrial Chemistry/Chemical Engineering , Characterization and Evaluation of Materials , Nuclear Physics, Heavy Ions, Hadrons , Physical Chemistry

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