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Fine purification of silane for removal of chlorosilanes by membrane gas separation

Vorotyntsev, V. M. / Drozdov, P. N. / Vorotyntsev, I. V. / Manokhina, S. N. / Knysh, S. S.

Abstract The membrane separation of a silane, dichlorosilane, trichlorosilane, and tetrachlorosilane gas mixture has been theoretically and experimentally studied. The ideal separation factors have been determined experimentally and their values in the separation cell at pressures P 1 and P 2 have been found. The separation factor has been calculated for different ratios of flows in the compartments of a membrane module. The silane cleaning process for the removal of highly penetrating impurities in a radial membrane module and in a membrane module with a feed tank has been calculated.

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Fine purification of silane for removal of chlorosilanes by membrane gas separation

Vorotyntsev, V. M. / Drozdov, P. N. / Vorotyntsev, I. V. / Manokhina, S. N. / Knysh, S. S.

Abstract The membrane separation of a silane, dichlorosilane, trichlorosilane, and tetrachlorosilane gas mixture has been theoretically and experimentally studied. The ideal separation factors have been determined experimentally and their values in the separation cell at pressures P 1 and P 2 have been found. The separation factor has been calculated for different ratios of flows in the compartments of a membrane module. The silane cleaning process for the removal of highly penetrating impurities in a radial membrane module and in a membrane module with a feed tank has been calculated.

Fine purification of silane for removal of chlorosilanes by membrane gas separation

Vorotyntsev, V. M. / Drozdov, P. N. / Vorotyntsev, I. V. / Manokhina, S. N. / Knysh, S. S.

Abstract The membrane separation of a silane, dichlorosilane, trichlorosilane, and tetrachlorosilane gas mixture has been theoretically and experimentally studied. The ideal separation factors have been determined experimentally and their values in the separation cell at pressures P 1 and P 2 have been found. The separation factor has been calculated for different ratios of flows in the compartments of a membrane module. The silane cleaning process for the removal of highly penetrating impurities in a radial membrane module and in a membrane module with a feed tank has been calculated.

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Title:

Fine purification of silane for removal of chlorosilanes by membrane gas separation

Contributors:

Vorotyntsev, V. M. (author) / Drozdov, P. N. (author) / Vorotyntsev, I. V. (author) / Manokhina, S. N. (author) / Knysh, S. S. (author)

Published in:

Petroleum Chemistry ; 53 ; 627-631

Publication date:

2013-12-01

Size:

5 pages

ISSN:

1555-6239 , 0965-5441

DOI:

https://doi.org/10.1134/S0965544113080161

Type of media:

Article (Journal)

Type of material:

Electronic Resource

Language:

English

Keywords:

silane , chlorosilanes , membrane , polydimethylsiloxane , gas separation Chemistry , Industrial Chemistry/Chemical Engineering

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